相关论文: A versatile maskless microscope projection photoli…
We developed a microdisplay-based microscope projection photolithography (MDMPP) technique in which a liquid crystal (LC) microdisplay is used as a reconfigurable photomask for a microscope projector. The LC microdisplay provides a…
Photolithography is a key part of modern semiconductor process flows, and photolithography steppers have been used for decades to achieve precise patterning for device fabrication. However, these tools are often large and expensive, which…
We adapted a conventional microscope for projection photolithography using an ultraviolet (UV) light-emitting diode (LED) as a light source. The use of a UV LED provides the microscope projector with several advantages in terms of…
Large-scale synthesis of DNA and RNA is a crucial technology for modern biological research ranging from genomics to nucleic acid therapeutics and for technological research ranging from nanofabrication of materials to molecular-level…
A single-pixel digital holography system with phase-encoded illumination using a digital micromirror device (DMD) as a spatial light modulator (SLM) is presented. The enhanced switching rate of DMDs, far exceeding the stringent frame-rate…
Light projection displays play an increasingly important role in our modern life. Core projection systems including liquid crystal displays and digital micromirror devices can impose spatial light modulation and actively shape light waves.…
We demonstrate a high-NA (0.88), ultra-low-f-number (f/0.2714), multi-wavelength (480nm, 550nm and 650nm) multilevel diffractive MicroLens Array (MLA) using inverse design. Each microlens in the array is close-packed with diameter of 70…
The multi-object spectrograph (MOS) has been the benchmark for the current generation of astronomical spectrographs, valued for its ability to acquire the spectra of hundreds of objects simultaneously. In the last two decades, the digital…
High-resolution lithographic techniques are often limited by low volumetric throughput, since there is no universal and scalable manufacturing process that can produce 3D metasurfaces. In this work, we demonstrate a high-speed holographic…
This paper presents a simple and effective method to fabricate a polydimethyl-siloxane (PDMS) microlens array with a high fill factor, which utilizes the UV proximity printing and photoresist replication methods. The concave microlens array…
Micro/nano electro-mechanical systems (MEMS/NEMS) are constantly attracting an increasing attention for their relevant technological applications in fields ranging from biology, medicine, ecology, energy to industry. Most of the…
Direct writing laser (DWL) grayscale lithography is introduced as a novel fabrication technique for multi-plane light conversion (MPLC) phase masks, enabling direct transfer of precise depth profiles onto substrates via reactive ion etching…
Programable spatial light modulators (SLMs) have significantly advanced the configurable optical trapping of particles. Typically, these devices are utilized in the Fourier plane of an optical system, but direct imaging of an amplitude…
Over the last two decades, spatial light modulators (SLMs) have revolutionised our ability to shape optical fields. They grant independent dynamic control over thousands of degrees-of-freedom within a single light beam. In this work we test…
Digital micromirror device (DMD) serves in a significant part of computational optical setups as a means of encoding an image by the desired pattern. The most prominent is its usage in the so-called single-pixel camera experiment. This…
Achieving high-precision light manipulation is crucial for delivering information through complex media with high fidelity. However, existing spatial light modulation devices face a fundamental tradeoff between speed and accuracy. Digital…
A simple and effective method to fabricate a high fill-factor triangular microlens array using the proximity printing in lithography process is reported. The technology utilizes the UV proximity printing by controlling a printing gap…
Background The accuracy of photomechanics measurements critically relies on image quality,particularly under extreme illumination conditions such as welding arc monitoring and polished metallic surface analysis. High dynamic range (HDR)…
We present a superpixel method for full spatial phase and amplitude control of a light beam using a digital micromirror device (DMD) combined with a spatial filter. We combine square regions of nearby micromirrors into superpixels by low…
Digital micromirror devices have gained popularity in wavefront shaping, offering a high frame rate alternative to liquid crystal spatial light modulators. They are relatively inexpensive, offer high resolution, are easy to operate, and a…