相关论文: Enhancing Thin-Film Wafer Inspection With A Multi-…
Soft robotics is applicable to a variety of domains due to the adaptability offered by the soft and compliant materials. To develop future intelligent soft robots, soft sensors that can capture deformation with nearly infinite…
Accurate and high-efficiency film metrology remains a key challenge in High-Volume Manufacturing (HVM), where conventional spectroscopic reflectometry and white light interferometry (WLI) are either limited by model dependence or…
Adaptive robots in dynamic production environments require robust perception capabilities, including 6D pose estimation and multi-object tracking. To address limitations in real-world data dependency, noise robustness, and spatiotemporal…
Dynamic axial focusing functionality has recently experienced widespread incorporation in microscopy, augmented/virtual reality (AR/VR), adaptive optics, and material processing. However, the limitations of existing varifocal tools continue…
Reduced-Order Modelling of the Bending of an Array of An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics…
Coating thickness measurement and inspection of defects beneath optically opaque surfaces are among the most promising commercial applications of the terahertz (THz) imaging technology. However, there are two main sources of complexity in…
Aligning a lens system relative to an imager is a critical challenge in camera manufacturing. While optimal alignment can be mathematically computed under ideal conditions, real-world deviations caused by manufacturing tolerances often…
Individualized manufacturing is becoming an important approach as a means to fulfill increasingly diverse and specific consumer requirements and expectations. While there are various solutions to the implementation of the manufacturing…
Spectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive index. However, a conventional ellipsometer, which utilizes a mechanically rotating polarizer and grating-based…
Sensors fabricated from high resistivity, float zone, silicon material have been the basis of vertex detectors and trackers for the last 30 years. The areas of these devices have increased from a few square cm to $\> 200\ m^2$ for the…
Polarizers and polarization selective resonant cavities (e.g., ring resonators, gratings), are key components for applications to photography, coherent optical detection, polarization-division-multiplexing, optical sensing and liquid…
The monitoring of rotating machinery is an essential task in today's production processes. Currently, several machine learning and deep learning-based modules have achieved excellent results in fault detection and diagnosis. Nevertheless,…
To obtain precise motion control of wafer stages, an adaptive neural network and fractional-order super-twisting control strategy is proposed. Based on sliding mode control (SMC), the proposed controller aims to address two challenges in…
This paper investigates the direct application of standardized designs on the robot for conducting robot hand-eye calibration by employing 3D scanners with collaborative robots. The well-established geometric features of the robot flange…
External effects such as shocks and temperature variations affect the calibration of visual-inertial sensor systems and thus they cannot fully rely on factory calibrations. Re-calibrations performed on short user-collected datasets might…
The use of robotic technology has drastically increased in manufacturing in the 21st century. But by utilizing their sensory cues, humans still outperform machines, especially in micro scale manufacturing, which requires high-precision…
Manipulation tasks often require robots to be continuously in contact with an object. Therefore tactile perception systems need to handle continuous contact data. Shear deformation causes the tactile sensor to output path-dependent readings…
Manipulating fragile deformable containers, such as disposable plastic cups filled with liquid, demands real-time grip-force adaptation within an extremely narrow force margin: insufficient force causes slip, while excessive force…
Linear Hall sensors are a cost-effective alternative to optical encoders for measuring the rotor positions of actuators, with the main challenge being that they exhibit position-dependent inaccuracies resulting from manufacturing…
Segmentation and tracking of unseen object instances in discrete frames pose a significant challenge in dynamic industrial robotic contexts, such as distribution warehouses. Here, robots must handle object rearrangement, including shifting,…