相关论文: Contact-interference Hybrid lithography: Toward Sc…
Large-area gratings play a crucial role in various engineering fields. However, traditional interference lithography is limited by the size of optical component apertures, making large-area fabrication a challenging task. Here, a method for…
We theoretically demonstrate the formation of different kinds of two-dimensional split-ring arrays in both triangular and square lattices by one-step holographic interference. The slit width of the split-ring can be adjusted by proper…
Laser Interference Lithography (LIL) is a versatile fabrication method for patterning sub-micron structures in arrays covering large areas. It is a facile and fast mask-less lithography process to produce large area periodic patterns. The…
We present an optical interference model to create chiral microstructures (spirals) and its realization in photoresist using holographic lithography. The model is based on the interference of six equally-spaced circumpolar linear polarized…
Multi-photon lithography has emerged as a powerful tool for photonic integration, allowing to complement planar photonic circuits by 3D-printed freeform structures such as waveguides or micro-optical elements. These structures can be…
The design of liquid-crystal diffractive phase plate coronagraphs for ground-based and space-based high-contrast imaging systems is limited by the trade-off between spectral bandwidth and polarization leakage. We demonstrate that by…
Developing a suitable production method for three-dimensional periodic nanostructures with high aspect ratios is a subject of growing interest. For mass production, Talbot lithography offers many advantages. However, one disadvantage is…
This paper presents a novel method to parallel fabricate large area (wafer scale) metallic nano-split-ring arrays with nanoimprint lithography (NIL). To our knowledge it is the first method that can pattern large area and high dense…
Two-dimensional (2D) diffraction gratings offer a polarization-independent coupling solution between the planar photonic chips and optical fibers, with advantages including placement flexibility, ease of fabrication, and tolerance to…
Additive manufacturing techniques enable the fabrication of functional microstructures with mechanical and chemical properties tailored to their intended use. One common technique is stereolithography, which has recently been augmented in…
Vertically aligned silicon micro/nanowire arrays of different sizes have been synthesized by combining the modified metal-assisted chemical etching (MACE) and reactive ion etching (RIE) methods. This is a novel lithography-free method to…
Immersed reflection gratings improve spectral resolving power by enabling diffraction within a high refractive index medium. This principle has been widely adopted to make grating spectrometers more compact. Conventional immersed gratings…
We propose a simple but effective strategy for polarization manipulation holographic lithography by single refractive prism. By tuning the polarization of single laser beam, we simply obtain a pill shape interference pattern where multiple…
A simple and effective method to fabricate a high fill-factor triangular microlens array using the proximity printing in lithography process is reported. The technology utilizes the UV proximity printing by controlling a printing gap…
Future far-infrared astrophysics observatories will require focal plane arrays containing thousands of ultra-sensitive, superconducting detectors, each of which needs to be optically coupled to the telescope. At longer wavelengths, many…
In-line polarimeters perform non-destructive polarization measurements of optical signals, and play a critical role in monitoring and controlling the polarization environment in for example optical networks. While current in-line…
Despite the fact that the resolution of conventional contact/proximity lithography can reach feature sizes down to ~0.5-0.6 micrometers, the accurate control of the linewidth and uniformity becomes already very challenging for gratings with…
Recently, metamaterials-inspired diffraction gratings (or metagratings) have demonstrated unprecedented efficiency in wavefront manipulation by means of relatively simple structures. Conventional one-dimensional (1D) gratings have a profile…
Fabrication of optical coherence tomography (OCT) fiber probes in cardiology involves sequentially splicing and cleaving multiple fibers to form a lens. During this process, the splice location-normally invisible under standard…
Extreme ultraviolet (EUV) lithography is the leading lithography technique in CMOS mass production, moving towards the sub-10 nm half-pitch (HP) regime with the ongoing development of the next generation high-numerical aperture (high-NA)…