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Scanning transmission electron microscopy (STEM) is an indispensable tool for atomic-resolution structural analysis for a wide range of materials. The conventional analysis of STEM images is an extensive hands-on process, which limits…

In this research work, we have demonstrated the application of Mask-RCNN (Regional Convolutional Neural Network), a deep-learning algorithm for computer vision and specifically object detection, to semiconductor defect inspection domain.…

计算机视觉与模式识别 · 计算机科学 2022-11-07 Bappaditya Dey , Enrique Dehaerne , Kasem Khalil , Sandip Halder , Philippe Leray , Magdy A. Bayoumi

Four-dimensional scanning transmission electron microscopy (4D-STEM) of local atomic diffraction patterns is emerging as a powerful technique for probing intricate details of atomic structure and atomic electric fields. However, efficient…

图像与视频处理 · 电气工程与系统科学 2019-01-15 Xin Li , Ondrej E. Dyck , Mark P. Oxley , Andrew R. Lupini , Leland McInnes , John Healy , Stephen Jesse , Sergei V. Kalinin

In this work, we perform semantic segmentation of multiple defect types in electron microscopy images of irradiated FeCrAl alloys using a deep learning Mask Regional Convolutional Neural Network (Mask R-CNN) model. We conduct an in-depth…

计算机视觉与模式识别 · 计算机科学 2021-10-18 Ryan Jacobs , Mingren Shen , Yuhan Liu , Wei Hao , Xiaoshan Li , Ruoyu He , Jacob RC Greaves , Donglin Wang , Zeming Xie , Zitong Huang , Chao Wang , Kevin G. Field , Dane Morgan

Scanning Transmission Electron Microscopy (STEM) enables the observation of atomic arrangements at sub-angstrom resolution, allowing for atomically resolved analysis of the physical and chemical properties of materials. However, due to the…

计算机视觉与模式识别 · 计算机科学 2025-04-04 Hesong Li , Ziqi Wu , Ruiwen Shao , Tao Zhang , Ying Fu

Understanding lattice deformations is crucial in determining the properties of nanomaterials, which can become more prominent in future applications ranging from energy harvesting to electronic devices. However, it remains challenging to…

Over the last decade, scanning transmission electron microscopy (STEM) has emerged as a powerful tool for probing atomic structures of complex materials with picometer precision, opening the pathway toward exploring ferroelectric,…

数据分析、统计与概率 · 物理学 2021-12-23 Ayana Ghosh , Christopher T. Nelson , Mark Oxley , Xiaohang Zhang , Maxim Ziatdinov , Ichiro Takeuchi , Sergei V. Kalinin

Recording atomic-resolution transmission electron microscopy (TEM) images is becoming increasingly routine. A new bottleneck is then analyzing this information, which often involves time-consuming manual structural identification. We have…

Scanning Transmission Electron Microscopy (STEM) offers high-resolution images that are used to quantify the nanoscale atomic structure and composition of materials and biological specimens. In many cases, however, the resolution is limited…

信号处理 · 电气工程与系统科学 2021-12-23 Daniel Nicholls , Alex Robinson , Jack Wells , Amirafshar Moshtaghpour , Mounib Bahri , Angus Kirkland , Nigel Browning

Scanning electron microscopy (SEM) is indispensable in diverse applications ranging from microelectronics to food processing because it provides large depth-of-field images with a resolution beyond the optical diffraction limit. However,…

Deep Neural Networks (DNNs) are widely used for decision making in a myriad of critical applications, ranging from medical to societal and even judicial. Given the importance of these decisions, it is crucial for us to be able to interpret…

计算机视觉与模式识别 · 计算机科学 2022-11-28 Teddy Koker , Fatemehsadat Mireshghallah , Tom Titcombe , Georgios Kaissis

Scanning transmission electron microscopy (STEM) is now the primary tool for exploring functional materials on the atomic level. Often, features of interest are highly localized in specific regions in the material, such as ferroelectric…

材料科学 · 物理学 2021-08-11 Nicole Creange , Ondrej Dyck , Rama K. Vasudevan , Maxim Ziatdinov , Sergei V. Kalinin

Here a new microscopic method is proposed to image and characterize very thin samples like few-layer materials, organic molecules, and nanostructures with nanometer or sub-nanometer resolution using electron beams of energies lower than 20…

仪器与探测器 · 物理学 2016-01-06 Ing-Shouh Hwang

Nanotechnology research requires the routine use of characterization methods with high spatial resolution. These experiments are rather costly, not only from the point of view of the expensive microscopes, but also considering the need of a…

材料科学 · 物理学 2015-10-12 M. J. Lagos , P. C. da Silva , D. Ugarte

Atom segmentation and localization, noise reduction and deblurring of atomic-resolution scanning transmission electron microscopy (STEM) images with high precision and robustness is a challenging task. Although several conventional…

材料科学 · 物理学 2021-02-23 Ruoqian Lin , Rui Zhang , Chunyang Wang , Xiao-Qing Yang , Huolin L. Xin

Controlling crystalline material defects is crucial, as they affect properties of the material that may be detrimental or beneficial for the final performance of a device. Defect analysis on the sub-nanometer scale is enabled by…

材料科学 · 物理学 2021-06-03 Nik Dennler , Antonio Foncubierta-Rodriguez , Titus Neupert , Marilyne Sousa

Recent advances in scanning transmission electron and scanning probe microscopies have opened exciting opportunities in probing the materials structural parameters and various functional properties in real space with angstrom-level…

We present a novel approach for extracting 3D atomic-level information from transmission electron microscopy (TEM) images affected by significant noise. The approach is based on formulating depth estimation as a semantic segmentation…

计算机视觉与模式识别 · 计算机科学 2026-01-29 Matan Leibovich , Mai Tan , Ramon Manzorro , Adria Marcos-Morales , Sreyas Mohan , Peter A. Crozier , Carlos Fernandez-Granda

Scanning Transmission Electron Microscopy (STEM) has become the main stay for materials characterization on atomic level, with applications ranging from visualization of localized and extended defects to mapping order parameter fields. In…

仪器与探测器 · 物理学 2019-01-15 Xin Li , Ondrej Dyck , Sergei V. Kalinin , Stephen Jesse

In the field of transmission electron microscopy, data interpretation often lags behind acquisition methods, as image processing methods often have to be manually tailored to individual datasets. Machine learning offers a promising approach…

图像与视频处理 · 电气工程与系统科学 2021-07-07 C. K. Groschner , Christina Choi , M. C. Scott
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