相关论文: Transcending the Acceleration-Bandwidth Trade-off:…
Precision motion stages are playing a prominent role in various manufacturing equipment. The drastically increasing demand for higher throughput in integrated circuit (IC) manufacturing and inspection calls for the next-generation precision…
Precision motion stages are an essential part of a wide range of manufacturing equipment, and their motion performance are critical to the quality and throughput of the systems. The drastically increasing demand for higher manufacturing…
Precision motion stages play a critical role in various manufacturing and inspection equipment, for example, the wafer/reticle scanning in photolithography scanners and positioning stages in wafer inspection systems. To meet the growing…
Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demands involves employing highly aggressive motion profiles,…
Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while still achieving accurate positioning of the moving-body. The…
Motion systems are a vital part of many industrial processes. However, meeting the increasingly stringent demands of these systems, especially concerning precision and throughput, requires novel control design methods that can go beyond the…
To obtain precise motion control of wafer stages, an adaptive neural network and fractional-order super-twisting control strategy is proposed. Based on sliding mode control (SMC), the proposed controller aims to address two challenges in…
Nanopositioning systems frequently encounter limitations in control bandwidth due to their lightly damped resonance behavior. This paper presents a novel Non-Minimum-Phase Resonant Controller (NRC) aimed at active damping control within…
Piezo-stepper actuators are used in many nanopositioning systems due to their high resolution, high stiffness, fast response, and the ability to position a mover over an infinite stroke by means of motion reminiscent of walking. The aim of…
A new method for the design of linear-phase robust far-field broadband beamformers using constrained optimization is proposed. In the method, the maximum passband ripple and minimum stopband attenuation are ensured to be within prescribed…
Despite the success of model predictive control (MPC), its application to high-dimensional systems, such as flexible structures and coupled fluid/rigid-body systems, remains a largely open challenge due to excessive computational…
We develop an adaptive control architecture to achieve stabilization and command following of uncertain dynamical systems with improved transient performance. Our framework consists of a new reference system and an adaptive controller. The…
Buckling at the micro and nanoscale generates distant bistable states which can be beneficial for sensing, shape-reconfiguration and mechanical computation applications. Although different approaches have been developed to access buckling…
The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from position dependent effects that originate from relative…
The escalating demand for high-speed and high-precision machining in machine tool feed system has brought to the forefront the challenge of its design method. Currently, existing methodologies struggle to ascertain compliance with dynamic…
Modern cyber-physical systems, such as automotive control, rely on feedback controllers that regulate the system towards desired a setpoint. In practice, however, the controller must also be scheduled efficiently on resource-constrained…
Precise control is an essential and elusive quality of emerging self-driving microscopes. It is widely understood these instruments must be capable of performing rapid, high-volume, and arbitrary movements for practical self-driving…
Rather than traditional position control, impedance control is preferred to ensure the safe operation of industrial robots programmed from demonstrations. However, variable stiffness learning studies have focused on task performance rather…
Precision motion systems are at the core of various manufacturing equipment. The rapidly increasing demand for higher productivity necessitates higher control bandwidth in the motion systems to effectively reject disturbances while…
This paper considers sequential adaptive estimation of sparse signals under a constraint on the total sensing effort. The advantage of adaptivity in this context is the ability to focus more resources on regions of space where signal…