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Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…
Miniaturized two-dimensional scanning mirror based on microelectromechanical systems (MEMS) technology has great potential in automotive industry, consumer electronics, and biomedicine, etc. Due to its high frequency and large angle,…
Micro- and nanoelectromechanical system (MEMS and NEMS) resonators can exhibit rich nonlinear dynamics as they are often operated at large amplitudes with high quality factors and possess a high mode density with a variety of nonlinear…
This paper demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror,…
Optomechanical gradient forces arise from evanescent fields of guided waves in parallel photonic waveguides. When designed to be of attractive nature, they increase exponentially as the gap between the waveguides decreases. Moreover, the…
Micro/nano electro-mechanical systems (MEMS/NEMS) are constantly attracting an increasing attention for their relevant technological applications in fields ranging from biology, medicine, ecology, energy to industry. Most of the…
We present a simple technique to produce active Q-switching in various types of fiber amplifiers by active integration of an electrostatic actuated deformable metallic micro-mirror. The optical MEMS (MOEMS) device acts as one of the laser…
A moving pellicle superconducting mirror, which is driven by radiation pressure on its one side, and by the Coulomb force on its other side, can become a parametric oscillator that can generate microwaves when placed within a high-Q…
Subwavelength dielectric resonators assembled into metasurfaces have become a versatile tool for miniaturising optical components approaching the nanoscale. An important class of metasurface functionalities is associated with asymmetry in…
Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precision is desired. However, due to the sequential nature of point-scanning techniques, the settling time of…
We present a proof-of-concept LIDAR design that allows adaptive real-time measurements according to dynamically specified measurement patterns. We describe our optical setup and calibration, which enables fast sparse depth measurements…
Metasurfaces control optical wavefronts via arrays of nanoscale resonators laid out across a surface. When combined with III-V semiconductors with strong optical nonlinearities, a variety of nonlinear effects such as harmonic generation and…
We report on the experimental observation of mirror enhanced directional surface enhanced Raman scattering (SERS) from a self-assembled monolayer of molecules coupled to a nanowire-nanoparticle (NW-NP) junction on a mirror in remote…
We study optical parametric oscillations in Kerr-nonlinear microresonators, revealing an intricate solution space -- parameterized by the pump-to-signal conversion efficiency -- that arises from an interplay of nonlinear processes. Using a…
A conventional refractive lens surface can act as a positive (converging) or negative (diverging) lens, but the same surface cannot act as both. We show that a geometric phase metasurface lens can have the unique property of acting both as…
This work presents the design, simulation, fabrication, and characterization of a novel architectural compact two-dimensional (2D) resonant MEMS scanning mirror actuated by thin-film lead zirconate titanate (PZT). The device employs an…
A fundamental challenge in robot perception is the coupling of the sensor pose and robot pose. This has led to research in active vision where robot pose is changed to reorient the sensor to areas of interest for perception. Further,…
This work demonstrates the multifaceted dynamic motion and three-dimensional (3D) spatial manipulation of organic micro ring resonators (MRRs). The MRRs are fabricated via surface-tension-assisted self-assembly of…
The mechanical behavior of any semiconductor microstructure is inevitably coupled to light. In the case of micro mechanical resonators (MEMs), carrier generation can affect the quality factor of the resonance through electron-phonon…