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The performance and scalability of superconducting quantum circuits are fundamentally constrained by non-equilibrium quasiparticles, which induce microwave losses that limit resonator quality factors and qubit coherence times. Understanding…
A promising way to store quantum information is by encoding it in the bosonic excitations of microwave resonators. This provides for long coherence times, low dephasing rates, as well as a hardware-efficient approach to quantum error…
The overall, loaded quality factor $Q_\mathrm{L}$ quantifies the loss of energy stored in a resonator. Here we discuss on general grounds how $Q_\mathrm{L}$ of a planar microwave resonator made of a conventional superconductor should depend…
Superconducting boron doped silicon is a promising material for integrated silicon quantum devices. In particular, its low electronic density and moderate disorder make it a suitable candidate for the fabrication of large inductances with…
Millimeter-wave superconducting resonators are a useful tool for studying quantum device coherence in a new frequency domain. However, improving resonators is difficult without a robust and reliable method for coupling millimeter-wave…
We introduce a microwave circuit architecture for quantum signal processing combining design principles borrowed from high-Q 3D resonators in the quantum regime and from planar structures fabricated with standard lithography. The resulting…
Tantalum-based transmon qubits are a promising platform for building large-scale quantum processors. So far, these qubits have been made from tantalum films grown exclusively in the alpha phase ({\alpha}-Ta). The beta phase of tantalum…
We present a systematic study of the effects of shielding on the internal quality factors (Qi) of Al and TiN microwave resonators designed for use in quantum coherent circuits. Measurements were performed in an adiabatic demagnetization…
The performance of state-of-the-art superconducting quantum devices is currently limited by microwave dielectric losses at different surfaces and interfaces. {\alpha}-tantalum is a superconductor that has proven effective in reducing…
We describe the design and characterization of superconducting coplanar waveguide cavities tailored to facilitate strong coupling between superconducting quantum circuits and single trapped Rydberg atoms. For initial superconductor-atom…
Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…
A strategy aimed at decreasing dielectric loss in coplanar waveguides (CPW) and qubits involves the creation of trenches in the underlying substrate within the gaps of the overlying metallization. Participation of contamination layers…
We discuss the design and implementation of thin film superconducting coplanar waveguide micro- resonators for pulsed ESR experiments. The performance of the resonators with P doped Si epilayer samples is compared to waveguide resonators…
We have grown superconducting TiN films by atomic layer deposition with thicknesses ranging from 6 to 89 nm. This deposition method allows us to tune the resistivity and critical temperature by controlling the film thickness. The microwave…
We numerically and experimentally investigate the phononic loss for superconducting resonators fabricated on a piezoelectric substrate. With the help of finite element method simulations, we calculate the energy loss due to…
We report a reduction of the frequency noise in coplanar waveguide superconducting resonators. The reduction of 7 dB is achieved by removing the exposed dielectric substrate surface from the region with high electric fields and by using…
From the background of microwave-optomechanical experiments involving carbon nanotubes, the optimization of superconducting coplanar waveguide resonator devices is discussed. Two devices, one with unmodified geometry compared to previous…
Polycrystalline {\alpha}-tantalum (110) films deposited on c-plane sapphire substrate by sputtering are used in superconducting qubits nowadays. However, these films always occasionally form other structures, such as {\alpha}-tantalum (111)…
The quantum excitations of macroscopic surface acoustic waves (SAWs) have been tailored to control, communicate and transduce stationary and flying quantum states. However, the limited lifetime of this hybrid quantum systems remains…
A15 superconductors are distinguished by their high critical temperatures, magnetic fields, and current-carrying capabilities. Among them, Nb$_3$Al is of particular interest for superconducting quantum circuits as a means to extend device…