相关论文: Position and Mode Dependent Optical Detection Back…
In optical detection setups to measure the deflection of micro-cantilevers, part of the sensing light is absorbed, heating the mechanical probe. We present experimental evidences of a frequency shift of the resonant modes of a cantilever…
We describe a method for feedback-regulation of a microcantilever's response using optical radiation pressure. One laser measures the position of the cantilever and another laser applies a force that is a phase-shifted function of that…
A sensitive photoacoustic detection approach employing a silicon cantilever is investigated for power measurement of electromagnetic radiation. The technique which is actuated by pressure waves generated through radiation-induced heat,…
In this review article, we focus on emerging nanocantilever based biological sensors and discuss the response of nanocantilevers towards bio-molecules capture. The article guides the reader through various modes of operation (e.g., static…
When heated, micro-resonators present a shift of their resonance frequencies. We study specifically silicon cantilevers heated locally by laser absorption, and evaluate theoretically and experimentally their temperature profile and its…
Two back action (BA) processes generated by an optical cavity based detection device can deeply transform the dynamical behavior of an AFM microlever: the photothermal force or the radiation pressure. Whereas noise damping or amplifying…
The excitation of microresonators using focused intensity modulated light, known as photothermal excitation, is gaining significant attention due to its capacity to accurately excite microresonators without distortions, even in liquid…
Optical beam deflection is a popular method to measure the deformation of micromechanical devices. As it measures mostly a local slope, its sensitivity depends on the location and size of the optical spot. We present a method to evaluate…
The mechanical behavior of any semiconductor microstructure is inevitably coupled to light. In the case of micro mechanical resonators (MEMs), carrier generation can affect the quality factor of the resonance through electron-phonon…
Magnetoelastic sensors for the detection of low-frequency and low-amplitude magnetic fields are in the focus of research since more than 30 years. In order to minimize the limit of detection (LOD) of such sensor systems, it is of high…
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers,…
Highly coherent mechanical resonators are invaluable to ultrasensitive detection techniques by enabling detection of small forces. Studying mechanical resonators in a thermal equilibrium state at millikelvin temperatures provides a…
Quantum mechanics demands that the act of measurement must affect the measured object. When a linear amplifier is used to continuously monitor the position of an object, the Heisenberg uncertainty relationship requires that the object be…
Measurements of the deflection induced by thermal noise have been performed on a rectangular atomic force microscope cantilever in air. The detection method, based on polarization interferometry, can achieve a resolution of 1E-14 m/rtHz in…
For a long time, scintillator detectors have suffered from relatively weak spatial resolution due to various influencing factors. Additionally, the high cost of photomultiplier tubes (PMTs) has limited the widespread adoption of…
The sensitivity of mechanical resonators to physical quantities such as acceleration, pressure, mass and temperature enables them to underpin sensing and metrology applications. Here, we observe that the resonance frequency of a…
Nanomechanical resonator-based sensing devices are used in medical diagnostics based on their high-frequency dynamic behavior. Cantilevers fall into the category of Nanomechanical resonators. It also resembles a resonator whose shape is…
We present a micro-mechanical terahertz (THz) detector fabricated on a silicon on insulator (SOI) substrate and operating at room-temperature. The device is based on a U-shaped cantilever of micrometric size, on top of which two aluminum…
We report a thermo-optical bistability observed in silicon micro-cantilevers irradiated by a laser beam with mW powers: reflectivity, transmissivity, absorption, and temperature can change by a factor of two between two stable states for…
Optical measurement of the motion of a 940 kHz mechanical resonance of a silicon nitride nanostring resonator is demonstrated with a read out noise imprecision reaching 37 dB below that of the resonator's zero-point fluctuations. Via…