相关论文: L-Shape based Layout Fracturing for E-Beam Lithogr…

Triple patterning lithography (TPL) is one of the most promising techniques in the 14nm logic node and beyond. Conventional LELELE type TPL technology suffers from native conflict and overlapping problems. Recently, as an alternative…

Split Learning (SL) is a promising Distributed Learning approach in electromyography (EMG) based prosthetic control, due to its applicability within resource-constrained environments. Other learning approaches, such as Deep Learning and…

In this paper, we present the first structural binarization method for LLM compression to less than 1-bit precision. Although LLMs have achieved remarkable performance, their memory-bound nature during the inference stage hinders the…

Multifocal laser direct writing (LDW) based on phase-only spatial light modulator (SLM) can realize flexible and parallel nanofabrication with high throughput potential. In this investigation, a novel approach of combining two-photon…

Triple patterning lithography (TPL) is one of the most promising techniques in the 14nm logic node and beyond. However, traditional LELELE type TPL technology suffers from native conflict and overlapping problems. Recently LELEEC process…

In this work, we consider compressible single-phase flow problems in a porous media containing a fracture. In the latter, a non-linear pressure-velocity relation is prescribed. Using a non-overlapping domain decomposition procedure, we…

Microscale 3D printing technologies have been of increasing interest in industry and research for several years. Unfortunately, the fabricated structures always deviate from the respective expectations, often caused by the physico-chemical…

Accurate segmentation and measurement of lithography scanning electron microscope (SEM) images are crucial for ensuring precise process control, optimizing device performance, and advancing semiconductor manufacturing yield. Lithography…

This paper proposes LLaFS, the first attempt to leverage large language models (LLMs) in few-shot segmentation. In contrast to the conventional few-shot segmentation methods that only rely on the limited and biased information from the…

Although spatial information of images usually enhance the robustness of the Fuzzy C-Means (FCM) algorithm, it greatly increases the computational costs for image segmentation. To achieve a sound trade-off between the segmentation…

We present {\mu}Split, a dedicated approach for trained image decomposition in the context of fluorescence microscopy images. We find that best results using regular deep architectures are achieved when large image patches are used during…

We apply logic-based Benders decomposition (LBBD) to two-stage stochastic planning and scheduling problems in which the second-stage is a scheduling task. We solve the master problem with mixed integer/linear programming and the subproblem…

In medical imaging, scans often reveal objects with varied contrasts but consistent internal intensities or textures. This characteristic enables the use of low-frequency approximations for tasks such as segmentation and deformation field…

Moving towards significantly smaller nanostructures, direct structuring techniques such as electron beam lithography approach fundamental limitations in feature size and aspect ratios. Application of nanostructures like diffractive X-ray…

Electron-beam direct-write (EBDW) lithography systems must in the future transmit terabits of information per second to be viable for commercial semiconductor manufacturing. Lossless layout image compression algorithms with high decoding…

Structured low-rank (SLR) algorithms, which exploit annihilation relations between the Fourier samples of a signal resulting from different properties, is a powerful image reconstruction framework in several applications. This scheme relies…

This paper proposes a novel algorithm for the problem of structural image segmentation through an interactive model-based approach. Interaction is expressed in the model creation, which is done according to user traces drawn over a given…

The line edge roughness (LER) becomes a issue of e-beam lithography when feature size is reduced into nanometers. Therefore, minimizing the LER is a important method to increase the density of circuit patterns. One of the possible ways is…

Recent segmentation methods leveraging Multi-modal Large Language Models (MLLMs) have shown reliable object-level segmentation and enhanced spatial perception. However, almost all previous methods predominantly rely on specialist mask…

Traditional post-training quantization (PTQ) is considered an effective approach to reduce model size and accelerate inference of large-scale language models (LLMs). However, existing low-rank PTQ methods require costly fine-tuning to…