相关论文: Batch-fabricated cantilever probes with electrical…

We present a detailed modeling and characterization of our scalable microwave nanoprobe, which is a micro-fabricated cantilever-based scanning microwave probe with separated excitation and sensing electrodes. Using finite-element analysis,…

A stripline-type near-field microwave probe is microfabricated for microwave impedance microscopy. Unlike the poorly shielded coplanar probe that senses the sample tens of microns away, the stripline structure removes the stray fields from…

The fabrication and performances of cantilevered probes with reduced parasitic capacitance starting from a commercial Si3N4 cantilever chip is presented. Nanomachining and metal deposition induced by focused ion beam techniques were…

We have realized a microstrip based THz near field cantilever which enables quantitative measurements of the impedance of the probe tip at THz frequencies (0.3 THz). A key feature is the on-chip balanced hybrid coupler which serves as an…

We developed a process to fabricate nanoscale metallic gate electrodes on scanning probe cantilevers, including on the irregular surface of protruding cantilever tips. The process includes a floating-layer technique to coat the cantilevers…

Insulated cantilever probes with a high aspect ratio conducting apex have been fabricated and their dynamic and electrical properties analyzed. The cantilevers were coated with silicon dioxide and a via was fabricated through the oxide at…

We present the fabrication of nanoscale superconducting quantum interference devices (SQUIDs) at the apex of wireframe tips on self-aligned superconducting cantilever probes. The probes are made on silicon wafers using molding techniques in…

Aligning a microcantilever to an area of interest on a sample is a critical step in many scanning probe microscopy experiments, particularly those carried out on devices and rare, precious samples. We report a series of protocols that…

Scanning superconducting quantum interference device (SQUID) microscopy is a magnetic imaging technique combining high-field sensitivity with nanometer-scale spatial resolution. State-of-the-art SQUID-on-tip probes are now playing an…

We demonstrate the procedure of Scanning Probe Microscopy (SPM) conductive probe fabrication with a single multi-walled carbon nanotube (MWNT) on a silicon cantilever pyramid. The nanotube bundle reliably attached to the metal-covered…

In order to develop a new structure microwave probe, the fabrication of AFM probe on the GaAs wafer was studied. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. A tip having 8…

A small depression is created in a straight optical fiber taper to form a local probe suitable for studying closely spaced, planar microphotonic devices. The tension of the "dimpled" taper controls the probe-sample interaction length and…

We demonstrate a scanning force microscope, based upon a quartz tuning fork, that operates below 100 mK and in magnetic fields up to 6 T. The microscope has a conducting tip for electrical probing of nanostructures of interest, and it…

We outline calibrated measurements of the microwave reflection coefficient from the tunnel junction of an ultra-high vacuum low temperature scanning tunneling microscope. The microwave circuit design is described in detail, including an…

We report a self-aligned, monolithic electron interferometer, consisting of two 45 nm thick silicon layers separated by 20 $\mu$m. This interferometer was fabricated from a single crystal silicon cantilever on a transmission electron…

We present a design for a tunneling-current-assisted scanning near-field microwave microscope. For stable operation at cryogenic temperatures, making a small and rigid microwave probe is important. Our coaxial resonator probe has a length…

The thermo-electrical properties of a complex silicon cantilever structure used in thermal scanning probe lithography are modeled based on well established empirical laws for the thermal conductivity in silicon, the electrical conductivity…

Microwave impedance microscopy (MIM) is an emerging scanning probe technique for nanoscale complex permittivity mapping and has made significant impacts in diverse fields from semiconductors to quantum materials. To date, the most…

With the development of nanotechnology, the measurement of electrical properties in local area of materials and devices has become a great need. Although a lot kind of scanning probe microscope have been developed for satisfying the…

Single-wall carbon nanotube (SWNT) nanofibrils were assembled onto a variety of conductive scanning probes including atomic force microscope (AFM) tips and scanning tunnelling microscope (STM) needles using positive dielectrophoresis (DEP).…