金刚石中单自旋和自旋阵列的芯片级纳米加工
介观与纳米尺度物理
2010-08-02 v2 材料科学
量子物理
摘要
我们展示了一种基于电子束光刻胶孔径宽束氮注入的金刚石氮空位（NV）中心纳米加工技术。该方法能够在亚100纳米尺度上高通量地纳米加工单个NV中心。二次离子质谱（SIMS）测量有助于对注入氮进行深度剖析，从而提供NV中心空间分布的三维表征。片上共面波导的NV中心相干性测量表明，该可扩展纳米加工技术有望融入未来的量子应用。
引用
@article{arxiv.1007.0240,
title = {Chip-scale nanofabrication of single spins and spin arrays in diamond},
author = {David M. Toyli and Christoph D. Weis and Gregory D. Fuchs and Thomas Schenkel and David D. Awschalom},
journal= {arXiv preprint arXiv:1007.0240},
year = {2010}
}
备注
This paper has been withdrawn by the authors. 14 pages, 3 figures; Posting has been removed due to editorial request from ACS Nano Letters; This version has been removed by arXiv admin because it contains an inappropriate withdrawal notice