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Nanomechanical resonators, machined out of Silicon-on-Insulator wafers, are operated in the nonlinear regime to investigate higher-order mechanical mixing at radio frequencies, relevant to signal processing and nonlinear dynamics on…
Fabrication of superconducting nanomechanical resonators for quantum research, detectors and devices traditionally relies on a lithographic process, resulting in oscillators with sharp edges and a suspended length limited to a few 100…
Suspended aluminium nanoelectromechanical resonators have been fabricated, and the manufacturing process is described in this work. Device motion is driven and detected with a magnetomotive method. The resonance response has been measured…
Nanomechanical resonators having small mass, high resonance frequency and low damping rate are widely employed as mass detectors. We study the performances of such a detector when the resonator is driven into a region of nonlinear…
We describe a method with which to fabricate sub-micron mechanical structures from silicon-on-insulator substrates. We believe this is the first reported method for such fabrication, and our technique allows for complex, multilayer electron…
Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the…
Mechanical nonlinearities dominate the motion of nanoresonators already at relatively small oscillation amplitudes. Although single and coupled two-degrees-of-freedom models have been used to account for experimentally observed nonlinear…
We consider a nanomechanical analogue of a nonlinear interferometer, consisting of two parallel, flexural nanomechanical resonators, each with an intrinsic Duffing nonlinearity and with a switchable beamsplitter-like coupling between them.…
We observe the actuation of silicon nitride (SiN) nanomechanical resonators by electrical excitation of metal-dielectric-semiconductor (MDS) capacitors on their supporting silicon substrate. We develop first-principle models explaining this…
The sensitivity of mechanical resonators to physical quantities such as acceleration, pressure, mass and temperature enables them to underpin sensing and metrology applications. Here, we observe that the resonance frequency of a…
We probe electro-mechanical properties of InAs nanowire (diameter ~ 100 nm) resonators where the suspended nanowire (NW) is also the active channel of a field effect transistor (FET). We observe and explain the non-monotonic dispersion of…
We have developed a system for contactless measurement of nonlinear conductivity in the radio-frequency band, and over a wide temperature range. A non-resonant circuit is used to electrically excite the sample, and the induced signal is…
High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the…
Nanomechanical resonators are used as high performance detectors in a variety of applications such as mass spectrometry and atomic force microscopy. Initial emphasis in nanomechanical resonant sensor research was on increasing the…
We report an actuation/detection scheme with a top-down nano-electromechanical system for frequency shift-based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for…
The applications of nanomechanical resonators range from biomolecule mass sensing to hybrid quantum interfaces. Their performance is often limited by internal material damping, which can be greatly reduced by using crystalline materials.…
If driven sufficiently strongly, superconducting microresonators exhibit nonlinear behavior including response bifurcation. This behavior can arise from a variety of physical mechanisms including heating effects, grain boundaries or weak…
We describe and demonstrate a method by which the nonlinear piezoelectric properties of a piezoelectric material may be measured by detecting the force that it applies on a suspended micromechanical resonator at one of its mechanical…
Because of their nonlinearity, vibrational modes of resonantly driven nanomechanical systems have coexisting stable states of forced vibrations in a certain range of the amplitude of the driving force. Depending on its phase, which encodes…
Nanomechanical resonators with ultra-high quality factors have become a central element in fundamental research, enabling measurements below the standard quantum limit and the preparation of long-lived quantum states. Here, I propose that…