Suspended aluminium nanoelectromechanical resonators have been fabricated, and the manufacturing process is described in this work. Device motion is driven and detected with a magnetomotive method. The resonance response has been measured at 4.2 K temperature in vacuum and low pressure 4He gas. At low oscillation amplitudes the resonance response is linear, producing Lorentzian line shapes, and Q-values up to 4400 have been achieved. At higher oscillation amplitudes the devices show nonlinear Duffing-like behavior. The devices are found to be extremely sensitive to pressure in 4He gas. Such device is a promising tool for studying properties of superfluid helium.
@article{arxiv.1807.06099,
title = {Nanomechanical resonators for cryogenic research},
author = {T. Kamppinen and V. B. Eltsov},
journal= {arXiv preprint arXiv:1807.06099},
year = {2019}
}
Comments
8 pages, 6 figures, proceedings of QFS2018 conference, to be published in Journal of Low Temperature Physics (preprint)