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Using a combination of experimental techniques and density functional theory (DFT) calculations, the influence of lithium insertion on the electronic and electrochemical properties of fluourine-doped SnO$_2$ (FTO) is assessed. For this…

Ruthenium dioxide (RuO$_2$) thin films were synthesized by Chemical Solution Deposition (CSD) on silicon substrates using only water and acetic acid as solvents. The microstructure, phase-purity, electrical and optical properties as well as…

Electron-beam (e-beam) lithography is commonly used in fabricating metal-oxide-silicon (MOS) quantum devices but creates defects at the Si/SiO$_2$ interface. Here we show that a forming gas anneal is effective at removing shallow defects…

Materials Science · Physics 2017-03-23 Jin-Sung Kim , Alexei M. Tyryshkin , Stephen A. Lyon

Microwave loss in superconducting titanium nitride (TiN) films is attributed to two-level systems in various interfaces arising in part from oxidation and microfabrication-induced damage. Atomic layer etching (ALE) is an emerging…

Mesoscale and Nanoscale Physics · Physics 2023-10-26 Azmain A. Hossain , Haozhe Wang , David S. Catherall , Martin Leung , Harm C. M. Knoops , James R. Renzas , Austin J. Minnich

Strontium titanate is a low-temperature, non-Bardeen-Cooper-Schrieffer superconductor that superconducts to carrier concentrations lower than in any other system and exhibits avoided ferroelectricity at low temperatures. Neither the…

Amorphous vanadium dioxide (VO$_{2}$) films deposited by atomic layer deposition (ALD) were crystallized with an ex situ anneal at 660-670 ${\deg}$C for 1-2 hours under a low oxygen pressure (10$^{-4}$ to 10$^{-5}$ Torr). Under these…

Two-dimensional tungsten disulfide (WS2) is a promising semiconductor for next-generation optoelectronic and photovoltaic devices, but scalable routes to uniform, large-area films remain challenging. In this study, a systematic thermal…

Materials Science · Physics 2025-12-01 Jisun Kim , Yoosuk Kim , Seung-Ho Park , Yong Hun Ko , Chong-Yun Park

An original modification of the standard Pulse Laser Deposition (PLD) method for preparing both undoped and indium doped zinc oxide (ZnO:In) thin films at low substrate temperature is proposed. This preparation method does not demand any…

Materials Science · Physics 2016-08-31 V. Savchuk , B. Kotlyarchuk , M. Oszwaldowski

Ruthenium metal and its oxide stand out for their exceptional catalytic activity, stability in Oxygen Evolution Reactions (OER) and electrical conductivity, making them indispensable in electronics and electrocatalysis. In this study,…

Materials Science · Physics 2024-10-31 S. S. Nalawade , R. S. Kim , J. Mahl , S. Cherono , I. Chris-Okoro , V. Craciun , J. Yan , E. Crumlin , D. Kumar , S. Aravamudhan

In nano-device applications using 2D van der Waals materials, a heat dissipation through nano-scale interfaces can be a critical issue for optimizing device performances. By using a time-domain thermoreflectance measurement technique, we…

Mesoscale and Nanoscale Physics · Physics 2018-12-07 Young-Gwan Choi , Do-Gyeom Jeong , H. I. Ju , C. J. Roh , Geonhwa Kim , Bongjin Simon Mun , Tae Yun Kim , Sang-Woo Kim , J. S. Lee

This study focuses on enhancing the electrical and thermoelectric properties of tungsten trioxide (WO$_3$) thin films using the spray pyrolysis technique. Three samples, namely A$_1$, A$_2$, and A$_3$, were prepared by depositing the films…

Applied Physics · Physics 2023-07-11 Zahra Asghari , Hamid Arian Zad , Hosein Eshghi

Transparent conductive indium tin oxide (ITO) thin films, electrochemically intercalated with sodium or other cations, show tunable superconducting transitions with a maximum $T_c$ at 5 K. The transition temperature and the density of…

Superconductivity · Physics 2013-02-07 Ali E. Aliev , Ka Xiong , Kyeongjae Cho , M. B. Salamon

Thin aluminum oxide films were deposited by a new and simple physicochemical method called chemical liquid phase deposition (CLD) on semiconductor materials. Aluminum sulfate with crystallized water and sodium bicarbonate were used as…

Materials Science · Physics 2007-05-23 Jie Sun , Yingchun Sun

In this paper we demonstrated the thermal Atomic Layer Deposition (ALD) growth at 250 {\deg}C of highly homogeneous and ultra-thin ($\approx$ 3.6 nm) $Al_2O_3$ films with excellent insulating properties directly onto a monolayer (1L)…

In this work, we report high-performance atomic-layer-deposited indium oxide (In2O3) transistors with high gated-Hall mobility ({\mu}H) exceeding 100 cm2/Vs at room temperature (RT). It is found that the deposition of top hafnium oxide…

Materials Science · Physics 2025-10-20 Chen Wang , Kai Jiang , Jinxiu Zhao , Ziheng Wang , Guilei Wang , Chao Zhao , Mengwei Si

Wireless SAW reflective delay line (R-DL) technology is very powerful to carry out remote measurements of various parameters under harsh environments, while enabling the identification of a given sensor among several of them. However, R-DL…

Atomically-abrupt interfaces in transition metal oxide (TMO) heterostructures could host a variety of exotic condensed matter phases that may not be found in the bulk materials at equilibrium. A critical step in the development of such…

Two-level system (TLS) defects in dielectrics are known to limit the performance of electronic devices. We study TLS using millikelvin microwave loss measurements of three atomic layer deposited (ALD) oxide films--crystalline BeO…

Recently, the signs of both superconducting transition temperature (Tc) beyond 60 K and spin density wave (SDW) have been observed in FeSe thin film on SrTiO3 (STO) substrate, which suggests a strong interplay between superconductivity and…

Superconductivity · Physics 2014-01-08 Hai-Yuan Cao , Shiyong Tan , Hongjun Xiang , D. L. Feng , Xin-Gao Gong

In this study, the method of low-temperature atomic layer deposition (ALD), which is applied on the soft photo-resist (PR) substrate forming hafnium dioxide (HfO2) at 40 C to 85 C, is reported for the first time. This reveals the potential…

Applied Physics · Physics 2018-07-13 KP Peng , YC Liu , IF Lin , CC Lin , SW Huang , CC Ting
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