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An important consideration in miniaturizing transistors is maximizing the coupling between the gate and the semiconductor channel. A nanowire with a coaxial metal gate provides optimal gate-channel coupling, but has only been realized for…

Mesoscale and Nanoscale Physics · Physics 2012-01-19 Kristian Storm , Gustav Nylund , Lars Samuelson , Adam P. Micolich

Field-effect transistors (FETs) with single gates are adversely affected by short channel effects such as drain-induced barrier lowering (DIBL) and increases in the magnitude of sub-threshold swing as the channel length is reduced.…

Materials Science · Physics 2026-04-22 Chankeun Yoon , Juhan Ahn , Yuchen Zhou , Jaydeep P. Kulkarni , Ananth Dodabalapur

In order to continue to improve integrated circuit performance and functionality, scaled transistors with short channel lengths and low thickness are needed. But the further scaling of silicon-based devices and the development of…

Materials Science · Physics 2022-03-08 Mengwei Si , Zehao Lin , Zhizhong Chen , Xing Sun , Haiyan Wang , Peide D. Ye

As silicon transistors scale toward future technology nodes, three-dimensional architectures -- including gate-all-around (GAA) nanoribbon and complementary field-effect transistors (CFETs) -- require channel widths in the tens of…

We have performed numerical modeling of dual-gate ballistic n-MOSFET's with channel length of the order of 10 nm, including the effects of quantum tunneling along the channel and through the gate oxide. Our analysis includes a…

Mesoscale and Nanoscale Physics · Physics 2009-10-31 Y. Naveh , K. K. Likharev

Carbon nanotube field-effect transistors with structures and properties near the scaling limit with short (down to 50 nm) channels, self aligned geometries, palladium electrodes with low contact resistance and high-k dielectric gate…

Other Condensed Matter · Physics 2015-06-24 Ali Javey , Jing Guo , Damon B. Farmer , Qian Wang , Erhan Yenilmez , Roy G. Gordon , Mark Lundstrom , Hongjie Dai

Amorphous oxide semiconductors (AOSs) have recently gained attention as a promising channel material of back-end-of-line (BEOL)-compatible transistors for monolithic three-dimensional (3D) integrations. However, the degradation in device…

Other Condensed Matter · Physics 2026-03-17 Yungyeong Park , Hakseon Lee , Yeonghun Lee

The first inversion-mode gate-all-around (GAA) III-V MOSFETs are experimentally demonstrated with a high mobility In0.53Ga0.47As channel and atomic-layer-deposited (ALD) Al2O3/WN gate stacks by a top-down approach. A well-controlled InGaAs…

Mesoscale and Nanoscale Physics · Physics 2016-11-17 Jiangjiang Gu , Yiqun Liu , Yanqing Wu , Robert Colby , Roy G. Gordon , Peide D. Ye

The atomic-level structural detail and the quantum effects are becoming crucial to device performance as the emerging advanced transistors, representatively GAAFETs, are scaling down towards sub-3nm nodes. However, a multiscale simulation…

Applied Physics · Physics 2023-08-17 Yue-Yang Liu , Haoran Lu , Zirui Wang , Hui-Xiong Deng , Lang Zeng , Zhongming Wei , Jun-Wei Luo , Runsheng Wang

We demonstrate a gate dielectric engineering approach leveraging an ultrathin, atomic layer deposited (ALD) silicon oxide interfacial layer (SiL) between the amorphous oxide semiconductor (AOS) channel and the high-k gate dielectric. SiL…

Scaling transistors' dimensions has been the thrust for the semiconductor industry in the last 4 decades. However, scaling channel lengths beyond 10 nm has become exceptionally challenging due to the direct tunneling between source and…

Mesoscale and Nanoscale Physics · Physics 2016-08-30 Hesameddin Ilatikhameneh , Tarek Ameen , Bozidar Novakovic , Yaohua Tan , Gerhard Klimeck , Rajib Rahman

We introduce a fabrication method for gate-all-around nanowire field-effect transistors. Single nanowires were aligned perpendicular to underlying bottom gates using a resist-trench alignment technique. Top gates were then defined aligned…

We investigate by low-temperature transport experiments the sub-threshold behavior of triple-gate silicon field-effect transistors. These three-dimensional nano-scale devices consist of a lithographically defined silicon nanowire surrounded…

Mesoscale and Nanoscale Physics · Physics 2009-11-11 H. Sellier , G. P. Lansbergen , J. Caro , N. Collaert , I. Ferain , M. Jurczak , S. Biesemans , S. Rogge

A vertical partial gate carbon nanotube (CNT) field-effect transistor (FET), which is amenable to the vertical CNT growth process and offers the potential for a parallel CNT array channel, is simulated using a self-consistent atomistic…

Mesoscale and Nanoscale Physics · Physics 2015-05-13 Youngki Yoon , James Fodor , Jing Guo

In this paper, we have experimentally demonstrated, for the first time, III-V 4D transistors with vertically stacked InGaAs nanowire (NW) channels and gate-all-around (GAA) architecture. Novel process technology enabling the transition from…

Mesoscale and Nanoscale Physics · Physics 2012-12-19 J. J. Gu , X. W. Wang , J. Shao , A. T. Neal , M. J. Manfra , R. G. Gordon , P. D. Ye

In this letter we discuss how the short channel behavior in sub 100 nm channel range can be improved by inducing a step surface potential profile at the back gate of an asymmetrical double gate (DG) Silicon-On-Insulator (SOI)…

Mesoscale and Nanoscale Physics · Physics 2010-08-19 M. Jagadesh Kumar , G. V. Reddy

Recently, short channel effects (SCE) and power consumption dissipation problems pose big challenges which need imperative actions to be taken to deal with for field effect transistor to further scale down as semiconductor technology enters…

Applied Physics · Physics 2023-04-18 Laixiang Qin , Chunlai Li , Ziang Xie , Yiqun Wei , Jin He

Layered semiconductors show promise as channel materials for field-effect transistors (FETs). Usually, such devices incorporate solid back or top gate dielectrics. Here, we explore de-ionized (DI) water as a solution top gate for…

Mesoscale and Nanoscale Physics · Physics 2017-06-01 Yuan Huang , Eli Sutter , Peter Sutter

Nanoscale semiconductor materials have been extensively investigated as the channel materials of transistors for energy-efficient low-power logic switches to enable scaling to smaller dimensions. On the opposite end of transistor…

We develop a robust and versatile platform to define nanostructures at oxide interfaces via patterned top gates. Using LaAlO$_3$/SrTiO$_3$ as a model system, we demonstrate controllable electrostatic confinement of electrons to nanoscale…

Mesoscale and Nanoscale Physics · Physics 2015-04-10 Srijit Goswami , Emre Mulazimoglu , Lieven M. K. Vandersypen , Andrea D. Caviglia
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