Related papers: High-NA In-Line Projector for EUV Lithography
We present here new experimental results on high contrast imaging of 10^{-7} at 4.5Lambda/D (Lambda = 0.820 microns) by combining a circular focal plane mask (coronagraph) of 2.5Lambda/D diameter and a multi-Gaussian pupil plane mask. Both…
Light-based additive manufacturing techniques enable a rapid transition from object design to production. In these approaches, a 3D object is typically built by successive polymerization of 2D layers in a photocurable resin. A recently…
Lithography simulation is a critical step in VLSI design and optimization for manufacturability. Existing solutions for highly accurate lithography simulation with rigorous models are computationally expensive and slow, even when equipped…
This paper presents a simple and effective method to fabricate a polydimethyl-siloxane (PDMS) microlens array with a high fill factor, which utilizes the UV proximity printing and photoresist replication methods. The concave microlens array…
The diffractive nature of light has limited optics and photonics to operate at scales much larger than the wavelength of light. The major challenge in scaling-down integrated photonics is how to mold the light flow below diffraction-limit…
Controlled and precise fabrication of structures with heights in the range of single digit nanometres is one of the challenges for diffraction gratings operating near-normal incidence in the extreme ultraviolet (EUV) and soft X-ray range.…
We proposed a method to achieve superresolved optical imaging without beating the diffraction limit of light. This is achieved by magnifying the ideal optical image of the object through higher-order spatial frequency generation while…
The demand for 360-degree 3D reconstruction has significantly increased in recent years across various domains such as the metaverse and 3D telecommunication. Accordingly, the importance of precise and wide-area 3D sensing technology has…
To overcome the limit of diffraction while achieving the superresolution technique, solid immersion lenses are the key optical elements for data storage and nanophotonics applications. Recent demonstrations have shown how different…
Fourier ptychography (FP) is a promising computational imaging technique that overcomes the physical space-bandwidth product (SBP) limit of a conventional microscope by applying angular diversity illuminations. However, to date, the…
Dielectric tensor tomography is an imaging technique for mapping three-dimensional distributions of dielectric properties in transparent materials. This work introduces an enhanced illumination strategy employing a micro-electromechanical…
3D image reconstruction from a set of X-ray projections is an important image reconstruction problem, with applications in medical imaging, industrial inspection and airport security. The innovation of X-ray emitter arrays allows for a…
An extended aperture has the potential to greatly improve ultrasound imaging performance. This work extends the effective aperture size by coherently compounding the received radio frequency data from multiple transducers. A framework is…
Near-field phase-shifting contact lithography is modeled to characterize electromagnetic absorption in a photoresist layer with one face in contact with a quartz binary phase-shift mask. The broadband ultraviolet illumination is represented…
Pattern transfer by deep anisotropic etch is a well-established technique for fabrication of nanoscale devices and structures. For this technique to be effective, the resist material plays a key role and must have high resolution,…
We propose to use high numerical aperture single mode optical fibers like photonic crystal fiber for lensless in-line holographic microscopy. Highly divergent beam helps to overcome the spatial sampling limitation of the image sensor. In…
Bi-spectral beam extraction combines neutrons from two different kind of moderators into one beamline, expanding the spectral range and thereby the utilization of an instrument. This idea can be realized by a mirror that reflects long…
A method for displaying volumetric images, which exploits our binocular vision and does not require eyewear, is discussed. The display can be rendered as a matrix of pivoting micromirrors irradiated by a light beam; each micromirror focuses…
This work presents the design, simulation, fabrication, and characterization of a novel architectural compact two-dimensional (2D) resonant MEMS scanning mirror actuated by thin-film lead zirconate titanate (PZT). The device employs an…
Solid-state single-photon emitters are key components for integrated quantum photonic devices. However, they can suffer from poor extraction efficiencies, caused by the large refractive index contrast between the bulk material they are…