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Related papers: High-NA In-Line Projector for EUV Lithography

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Modern imaging systems can be enhanced in efficiency, compactness, and application through introduction of multilayer nanopatterned structures for manipulation of light based on its fundamental properties. High transmission efficiency…

The resolution of far-field optical microscopes, which rely on propagating optical modes, is widely believed to be limited because of diffraction to a value on the order of a half-wavelength $\lambda /2$ of the light used. Although…

Materials Science · Physics 2009-11-10 Igor I. Smolyaninov , Christopher C. Davis , Jill Elliott , Anatoly V. Zayats

The correction of the aberration of transcranial focused ultrasounds is a relevant issue for enhancing various non-invasive medical treatments. Emission through multi-element phased arrays has been the most widely accepted method to reduce…

Medical Physics · Physics 2018-05-28 Marcelino Ferri , JM Bravo , Javier Redondo , JV Sánchez-Pérez

Micro/nano electro-mechanical systems (MEMS/NEMS) are constantly attracting an increasing attention for their relevant technological applications in fields ranging from biology, medicine, ecology, energy to industry. Most of the…

Materials Science · Physics 2021-03-10 Omar Tricinci , Marco Carlotti , Andrea Desii , Fabian Meder , Virgilio Mattoli

A custom, flat field, extreme ultraviolet EUV spectrometer built specifically for use with low power light sources that operate under ultrahigh vacuum conditions is reported. The spectral range of the spectrometer extends from 4 nm to 40…

Ground-based millimeter and sub-millimeter telescopes are attempting to image the sky with ever-larger cryogenically-cooled bolometer arrays, but face challenges in mitigating the infrared loading accompanying large apertures. Absorptive…

Instrumentation and Methods for Astrophysics · Physics 2014-07-23 Z. Ahmed , J. A. Grayson , K. L. Thompson , C. L. Kuo , G. Brooks , T. Pothoven

EUV scatterometry is performed on 3D patterns on EUV lithography masks. Numerical simulations of the experimental setup are performed using a rigorous Maxwell solver. Mask geometry is determined by minimizing the difference between…

Optics · Physics 2011-10-24 S. Burger , L. Zschiedrich , J. Pomplun , F. Schmidt , A. Kato , C. Laubis , F. Scholze

There has been a significant effort to design nanophotonic structures that process images at the speed of light. A prototypical example is in edge detection, where photonic-crystal-, metasurface-, and plasmon-based designs have been…

Optics · Physics 2021-07-26 Wenjin Xue , Owen D. Miller

Wide-angle optical functionality is crucial for implementation of advanced imaging and image projection devices. Conventionally, wide-angle operation is attained by complicated assembly of multiple optical elements. Recent advances in…

Harmonic generation mechanisms are of great interest in nanoscience and nanotechnology, since they allow generating visible light by using near-infrared radiation, which is particularly suitable for its endless applications in…

We develop a scannerless non-line-of-sight three dimensional imaging system based on a commercial 32x32 SPAD camera combined with a 70 ps pulsed laser. In our experiment, 1024 time histograms can be achieved synchronously in 3s with an…

Image and Video Processing · Electrical Eng. & Systems 2020-11-11 Chenfei Jin , Meng Tang , Legeng Jia , Xiaorui Tian , Jie Yang , Kai Qiao , Siqi Zhang

We demonstrate an axisymmetric inverse-designed metalens to improve the performance of zone-plate-array lithography (ZPAL), one of the maskless lithography approaches, that offer a new paradigm for nanoscale research and industry. First, we…

Optics · Physics 2022-12-14 Haejun Chung , Feng Zhang , Hao Li , Owen D. Miller , Henry I. Smith

This paper introduces a two-and multi-level phase mask design for improved depth of focus. A novel technique is proposed incorporating cubic and generalized cubic wavefront coding (WFC). The obtained system is optical-electronic requiring…

Optics · Physics 2017-07-26 Vladimir Katkovnik , Nicholas Hogasten , Karen Egiazarian

High-power lasers have numerous scientific and industrial applications. Some key areas include laser cutting and welding in manufacturing, directed energy in fusion reactors or defense applications, laser surgery in medicine, and advanced…

To date, high-resolution (< 1 nm) imaging of extended objects in three-dimensions (3D) has not been possible. A restriction known as the Crowther criterion forces a tradeoff between object size and resolution for 3D reconstructions by…

Materials Science · Physics 2014-11-20 Robert Hovden , Peter Ercius , Yi Jiang , Deli Wang , Yingchao Yu , Hector D. Abruna , Veit Elser , David A. Muller

NACO is the famous and versatile diffraction limited NIR imager and spectrograph with which ESO celebrated 10 years of Adaptive Optics at the VLT. Since two years a substantial effort has been put in to understanding and fixing issues that…

Instrumentation and Methods for Astrophysics · Physics 2012-10-12 Julien H. V. Girard , Jared O'Neal , Dimitri Mawet , Markus Kasper , Gérard Zins , Benoît Neichel , Johann Kolb , Valentin Christiaens , Martin Tourneboeuf

High-order edge-enhanced imaging enables precise feature localization and effective background suppression, offering a powerful tool for real-time recognition and high-contrast visualization. Extending this capability to the mid-infrared…

Optics · Physics 2026-05-14 Jixi Zhang , Kun Huang , Shina Liao , Zhuohang Wei , Jianan Fang , Heping Zeng

We present two long-working-distance objective lenses with numerical apertures (NA) of 0.29 and 0.4 for single-atom experiments. The objective lenses are assembled entirely by the commercial on-catalog $\Phi$1'' singlets. Both the…

One-photon or two photon absorption by dye molecules in photopolymers enable direct 2D & 3D lithography of micro/nano structures with high spatial resolution and can be used effectively in fabricating artificially structured nanomaterials.…

Soft Condensed Matter · Physics 2016-09-09 Raghvendra P Chaudhary , Arun Jaiswal , Govind Ummethala , Suyog R Hawal , Sumit Saxena , Shobha Shukla

Current nanostructure fabrication by etching is usually limited to planar structures as they are defined by a planar mask. The realisation of three-dimensional (3D) nanostructures by etching requires technologies beyond planar masks. We…

Materials Science · Physics 2016-09-08 D. A. Grishina , C. A. M. Harteveld , L. A. Woldering , W. L. Vos
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