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Precision motion stages are playing a prominent role in various manufacturing equipment. The drastically increasing demand for higher throughput in integrated circuit (IC) manufacturing and inspection calls for the next-generation precision…
Micro/Nano-positioning stages are of great importance in a wide range of manufacturing machines and instruments. In recent years, the drastically growing demand for higher throughput and reduced power consumption in various IC manufacturing…
Precision motion stages are an essential part of a wide range of manufacturing equipment, and their motion performance are critical to the quality and throughput of the systems. The drastically increasing demand for higher manufacturing…
Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demands involves employing highly aggressive motion profiles,…
Precise control is an essential and elusive quality of emerging self-driving microscopes. It is widely understood these instruments must be capable of performing rapid, high-volume, and arbitrary movements for practical self-driving…
Acoustic metamaterials offer exceptional control over wave propagation, but their potential remains unfulfilled due to fabrication constraints. Conventional processes yield mostly rigid, planar structures, whereas soft-matter alternatives…
Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while still achieving accurate positioning of the moving-body. The…
A new method for the design of linear-phase robust far-field broadband beamformers using constrained optimization is proposed. In the method, the maximum passband ripple and minimum stopband attenuation are ensured to be within prescribed…
Flexible electronics is an emerging field in many applications ranging from in vivo biomedical devices to wearable smart systems. The capability of conforming to curved surfaces opens the door to add electronic components to miniaturized…
To obtain precise motion control of wafer stages, an adaptive neural network and fractional-order super-twisting control strategy is proposed. Based on sliding mode control (SMC), the proposed controller aims to address two challenges in…
Motion systems are a vital part of many industrial processes. However, meeting the increasingly stringent demands of these systems, especially concerning precision and throughput, requires novel control design methods that can go beyond the…
Conventional stress monitoring relies on episodic, symptom-focused interventions, missing the need for continuous, accessible, and cost-efficient solutions. State-of-the-art approaches use rigid, silicon-based wearables, which, though…
Growing demands in the semiconductor industry result in the need for enhanced performance of lithographic equipment. However, position tracking accuracy of high precision mechatronics is often limited by the presence of disturbance sources,…
Lightweight, controllable, and physically plausible human motion synthesis is crucial for animation, virtual reality, robotics, and human-computer interaction applications. Existing methods often compromise between computational efficiency,…
High-frequency focused ultrasound is widely used in biomedical applications such as high-resolution imaging, neuromodulation, particle manipulation, and so on. However, dynamic tuning of the focal plane in conventional systems often relies…
This work presents a computationally lightweight motion planner for over-actuated platforms. For this purpose, a general state-space model for mobile platforms with several kinematic chains is defined, which considers non-linearities and…
The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from position dependent effects that originate from relative…
As the performance gains from accelerating quantized matrix multiplication plateau, the softmax operation becomes the critical bottleneck in Transformer inference. This bottleneck stems from two hardware limitations: (1) limited data…
The rapid adaptation of data driven AI models, such as deep learning inference, training, Vision Transformers (ViTs), and other HPC applications, drives a strong need for runtime precision configurable different non linear activation…
High-density microfluidics is becoming an important experimental platform for studying complex biological systems such as synthetic gene regulatory networks, molecular biocomputating of engineered cells, distributing rapid point-of-care…