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Chip-scale optical phased arrays could enable compact beam steering and LIDAR for autonomous vehicles, precision robotics, and free-space optical communications. Because these applications demand wide angle beam steering as well as high…
In this work, we present a multi-layer optical phased array (OPA) designed for dual-axis beam steering on a silicon (Si) platform, utilizing only wavelength tuning. Our design eliminates the need for grating couplers, commonly required for…
We demonstrate a one-dimensional optical phased array on an integrated silicon platform for operation at 1.55 microns. Light is emitted end-fire from the chip edge where the waveguides are terminated. The innovative design and high…
We present a silicon-nitride-based optical phased array with built-in focusing and steering capability, that operates at 522 nm and is aimed at complementing a micro-electrode array for joint electrical and optical probing of retinal…
We implement an integrated multi-electrode array on a silicon-nitride-based photonic integrated circuit for ex-vivo retinal characterization via optical stimulation. The interrogation beam formers, based on curved grating emitters and…
Beam steering device such as optical phased array (OPA) is a key component in applications of solid-state Lidar and wireless communication. The traditional single-layer optical phased array (OPA) results in a significant energy loss due to…
Photonic integrated circuit based optical phased arrays (PIC-OPA) are emerging as promising programmable processors and spatial light modulators, combining the best of planar and free-space optics. Their implementation in silicon photonic…
Photonic integrated circuit (PIC) phased arrays can be an enabling technology for a broad range of applications including free-space laser communications on compact moving platforms. However, scaling PIC phased arrays to a large number of…
We demonstrate power-efficient, thermo-optic, silicon nitride waveguide phase shifters for blue, green, and yellow wavelengths. The phase shifters operated with low power consumption due to a suspended structure and multi-pass waveguide…
Optical phased arrays (OPAs) implemented in integrated photonic circuits could enable a variety of 3D sensing, imaging, illumination, and ranging applications, and their convergence in new LIDAR technology. However, current integrated OPA…
Over the last decade, Optical Phased Arrays (OPA) have been extensively studied, targeting applications such as Light Detection And Ranging (LiDAR) systems, holographic displays, atmospheric monitoring and free space communications.…
The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index (n = 3.1) silicon rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas…
A 16-channel optical phased array is fabricated on a gallium arsenide photonic integrated circuit platform with a low-complexity process. Tested with a 1064 nm external laser, the array demonstrates 0.92{\deg} beamwidth, 15.3{\deg}…
We propose an on-chip Si photonics optical phased array based on a serial grating design which eliminates the use of directional couplers in previous designs. It significantly reduces overall phased array size especially when the number of…
Traditional photonic integrated circuit (PIC) inherits the mature CMOS fabrication process from the electronic integrated circuit (IC) industry. However, this process also limits the PIC structure to a single-waveguide-layer configuration.…
Optical phased arrays (OPAs) with high speed, low power consumption, and low insertion loss are appealing for many applications, such as light detection and ranging, free-space communication, image projection, and imaging. These OPAs can be…
The design, fabrication, and characterization of low loss ultra-compact bends in high index (n = 3.1 at {\lambda} = 1550 nm) PECVD silicon rich silicon nitride (SRN) is demonstrated and utilized to realize efficient, small footprint…
Optical beam steering has become indispensable in free-space optical communications, light detection and ranging (LiDAR), mapping, and projection. Optical phased array (OPA) leads this field, yet conventional versions still suffer from a…
We propose and demonstrate a hybrid waveguide platform using layered amorphous silicon and silicon nitride. The waveguide offers more degrees of freedom to design waveguides with desired confinement, effective index and polarization…
Optical phased array (OPA) is a promising beam-steering device for various applications such as light detection and ranging (LiDAR), optical projection, free-space optical communication and switching. However, the previously reported OPAs…