High efficiency end-fire 3-D optical phased array based on multi-layers Si3N4/SiO2 platform
Abstract
Beam steering device such as optical phased array (OPA) is a key component in applications of solid-state Lidar and wireless communication. The traditional single-layer optical phased array (OPA) results in a significant energy loss due to the substrate leakage caused by the downward coupling from the grating coupler structure. In this work we have investigated a structure based on multi-layers Si3N4/SiO2 platform that can form a 3-D OPA to emit the light from the edge of the device with high efficiency, a 2-D converged out-coupling beam will be end-fired to the air. The high efficiency and wide horizontal beam steering are demonstrated numerically, the influence of vertical cross-talk, the delay length, number of waveguide layers, and the fabrication feasibility are also discussed.
Keywords
Cite
@article{arxiv.1912.03326,
title = {High efficiency end-fire 3-D optical phased array based on multi-layers Si3N4/SiO2 platform},
author = {Dachuan Wu and Yasha Yi and Yuxiao Zhang},
journal= {arXiv preprint arXiv:1912.03326},
year = {2020}
}