Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride
Optics
2023-02-15 v1 Applied Physics
Abstract
The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index (n = 3.1) silicon rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115{\deg} at a fixed wavelength of 1525 nm. A spot size of 0.11{\deg} has been measured at boresight, consistent with theory. We demonstrate SRN as a viable material choice for chip-scale OPA applications due to its high thermo-optic coefficient, high optical power handling capacity due to negligible two-photon absorption (TPA), wide transparency window, low propagation loss, and CMOS compatibility.
Keywords
Cite
@article{arxiv.2209.13229,
title = {Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride},
author = {Hani Nejadriahi and Prabhav Gaur and Karl Johnson and Steve Pappert and Yeshaiahu Fainman and Paul Yu},
journal= {arXiv preprint arXiv:2209.13229},
year = {2023}
}
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6 figures