Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride
Applied Physics
2021-09-29 v1 Optics
Abstract
The design, fabrication, and characterization of low loss ultra-compact bends in high index (n = 3.1 at {\lambda} = 1550 nm) PECVD silicon rich silicon nitride (SRN) is demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends are structured into a folded waveguide geometry to form a rectangular spiral within an area of 65 x 65 \mum2 possessing a total active waveguide length of 1.2 mm. The device features a phase shifting efficiency of 8 mW/{\pi} and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform combining the properties of silicon and silicon stoichiometric nitride
Keywords
Cite
@article{arxiv.2106.09476,
title = {Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride},
author = {Hani Nejadriahi and Steve Pappert and Yeshaiahu Fainman and Paul Yu},
journal= {arXiv preprint arXiv:2106.09476},
year = {2021}
}
Comments
4 page, 3 figures, 1 table