Related papers: Nitrogen Plasma Passivated Niobium Resonators for …
We have successfully fabricated micron-scale Cu-AlO$_{x} $-Al-NbN normal metal-insulator-superconductor (NIS) tunnel junction devices, using pulsed laser deposition (PLD) for NbN film growth, and electron-beam lithography and shadow…
Superconducting Nb thin films have recently attracted significant attention due to their utility for quantum information technologies. In the processing of Nb thin films, fluoride-based chemical etchants are commonly used to remove surface…
We report the development of a superconducting acousto-optic phase modulator fabricated on a lithium niobate substrate. A titanium-diffused optical waveguide is placed in a surface acoustic wave resonator, where the electrodes for mirrors…
An increase in the quality factor of superconducting radiofrequency cavities is achieved by minimizing the surface resistance during processing steps. The surface resistance is the sum of temperature independent residual resistance and…
It is well known that moderate temperature baking of niobium cavities can improve the surface resistance. Presently, it is believed that the diffusion of oxygen into the bulk, resulting in interstitial defects, is responsible for the…
We have generated frequency combs spanning 0.5 to 20 GHz in superconducting half wave resonators at T=3 K. Thin films of niobium-titanium nitride enabled this development due to their low loss, high nonlinearity, low frequency dispersion,…
Niobium thin film wires were fabricated using electron beam lithography with a four layer liftoff mask system, and subsequently thinned by anodisation. The resistance along the wire was monitored in situ and trimmed by controlling the…
Thin layers of black phosphorus present an ideal combination of a 2D material with a tunable direct bandgap and high carrier mobility. However the material suffers from degradation in ambient conditions due to an oxidation reaction which…
Medium temperature (mid-T) baking, typically conducted at 300 350 C, enhances the quality factor of niobium (Nb) superconducting radio frequency cavities. High vacuum furnace baking is commonly preferred for its practicality in large-scale…
We have successfully fabricated the nitrogen-doped cuprous oxide thin films on the amorphous standard soda-lime glass by reactive high-power impulse magnetron sputtering. The energy of film-forming particles was controlled by the value of…
Numerous efforts have been devoted to improve the electronic and optical properties of III-V compound materials via reduction of their nonradiative states, aiming at highly-efficient III-V sub-micrometer devices. Despite many advances,…
We demonstrate that a high kinetic inductance disordered superconductor can realize a low microwave loss, non-dissipative circuit element with an impedance greater than the quantum resistance ($R_Q = h/4e^2 \simeq 6.5k\Omega$). This…
Zirconium nitride (ZrN) is a refractory material with good mechanical and thermal properties. It is therefore a good candidate for hard surface treatment at high temperature. In this work, we report the growth and characterization of ZrN by…
We present results of a fabrication-process development for the lithographic pattern transfer into the sub-100nm range by combining electron-beam lithography and reactive dry etching to obtain high quality niobium-based light-sensitive…
Periodically poled lithium niobate on insulator (PPLNOI) ridge waveguides are critical photonic components for both classical and quantum information processing. However, dry etching of PPLNOI waveguides often generates rough sidewalls and…
We have developped a novel lift-off process for fabrication of high quality superconducting submicron niobium structures. The process makes use of a thermostable polymer with a high transition temperature T_{g}= 235 C and an excellent…
Ferroelectric domain inversion and its effect on the stability of lithium niobate thin films on insulator (LNOI) are experimentally characterized. Two sets of specimens with different thicknesses varying from submicron to microns are…
Lithium niobate on insulator emerges as a promising platform for integrated microwave photonics because of its capability of ultralow-loss guidance and high-efficiency modulation of light. Chip-level integration of microwave filters is…
Niobium films are of interest in applications in various superconducting devices, such as superconducting radiofrequency cavities for particle accelerators and superconducting qubits for quantum computing. In this study, we addressed the…
Superconducting thin films with high intrinsic kinetic inductance are of great importance for photon detectors, achieving strong coupling in hybrid systems, and protected qubits. We report on the performance of titanium nitride resonators,…