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This paper presents a comprehensive analytical and simulation-based study of curved electrode geometries for enhancing the sensitivity of MEMS capacitive accelerometers. Expressions for the capacitance between a planar movable electrode and…
The dynamic behavior of a capacitive micro-electro-mechanical (MEMS) accelerometer is evaluated by using a theoretical approach which makes use of a squeeze film damping (SFD) model and ideal gas approach. The study investigates the…
This study presents the design, fabrication, and test of a micro accelerometer with intrinsic processing capabilities, that integrates the functions of sensing and computing in the same MEMS. The device consists of an inertial mass…
This paper presents the mathematical modeling-based design and simulation of normal mode MEMS capacitive pressure sensor for blood pressure sensing application. The normal blood pressure of human being is 120/80 mmHg. But this range varies…
In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor…
In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of objects based on MEMS technology. This sensor is a structure of a 4x4 array, with metal Ag as the capacitive electrode, which forms the tactile…
This paper presents the design and post-layout characteristics of a differential capacitance based inertial accelerometer This includes a MEMS based mechanical sensing element and a CMOS charge amplifier, which is the first stage of a…
In this paper, a novel coarse-to-fine optical MEMS accelerometer based on the Fabry Perot (FP) interferometer is proposed. The mechanical structure consists of a proof mass that is suspended by four L-shaped springs. The deflection of the…
The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first solution was designed to interface a capacitive humidity sensor…
In the present work we develop an algorithm for calibrating MEMS sensors, which accounts for the nonorthogonality of the accelerometers' axis, as well as for the constant bias and scaling errors. We derive an explicit formula for computing…
This research provides the theoretical feasibility study of a novel architecture of a MEMS differential resonant accelerometer, with switchable and tunable electrostatic transmission between the proof mass and the vibrating sensing beams.…
This paper shows the effect of scaling silicon accelerometers down from MEMS to NEMS. It models both electronics and Brownian noise sources for both capacitive and resonant devices, and computes the minimum detectable signal attainable.…
High-precision triaxial acceleration detection holds critical applications in seismic wave detection, geological resource exploration, and aerospace systems. Fabry-Perot (FP) optical sensors have gained widespread adoption in these domains…
In this paper, a differential MOEMS accelerometer based on the Fabry-Perot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the mechanical system is composed of a proof mass that is…
In this paper vibration combined high temperature cycle tests for packaged capacitive SOI-MEMS accelerometers are presented. The aim of these tests is to provide useful Design for Reliability information for MEMS designers. A high…
In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages of capacitive pressure sensor over piezoresistive pressure…
Thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival rating, low production cost, and…
Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the…
Monolithic active pixel sensors (MAPS) produced in a 65 nm CMOS imaging technology are being investigated for applications in particle physics. The MAPS design has a small collection electrode characterized by an input capacitance of ~fF,…
In order to achieve the challenging requirements on the CLIC vertex detector, a range of technology options have been considered in recent years. One prominent idea is the use of active sensors implemented in a commercial high-voltage CMOS…