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: It goes without saying that at present MEMS Technology became one of the latest and emerging methods because of its miniaturization and effective cost. Now near the beginning recognition of disease became a major challenge in front of…
Microelectromechanical systems (MEMS) have been applied to many measurement problems in physics, chemistry, biology and medicine. In parallel, cavity optomechanical systems have achieved quantum-limited displacement sensitivity and ground…
The calibration technique for accelerometers has been internationally developed for up to 20 kHz to ensure the reliability of vibration measurement. However, it has been established that the calibrated sensitivity changes at over 10 kHz…
This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk…
We show that a magnetically levitated microsphere in high vacuum can be used as an accelerometer by comparing its response to that of a commercially available geophone. This system shows great promise for ultrahigh acceleration…
We present simulations of the dynamic and temperature dependent behavior of Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this…
With the increase of the speed of computers, timing and power requirements are becoming crucial for memory devices. The main objective of the paper is to modify 180nm CMOS sense amplifier design by using memristive devices and improve the…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
A preliminary design of inclinometer for real-time monitoring system of soil displacement is proposed. The system is developed using accelerometer sensor with microelectromechanical system (MEMS) device. The main apparatus consists of a…
We design and experimentally demonstrate an architecture for achieving navigation-grade, fiber-packaged optomechanical accelerometers that can operate with a large dynamic range, over a wide temperature range, and without sophisticated…
Efficient design and performance of electrically actuated MEMS devices necessitate accurate estimation of electrostatic forces on the MEMS structures. This in turn requires thorough study of the capacitance of the structures and finally the…
We report on a compact, highly sensitive all-fiber accelerometer suitable for low frequency and low amplitude vibration sensing. The sensing elements in the device are two short segments of strongly coupled asymmetric multicore fiber (MCF)…
We present an optomechanical accelerometer with high dynamic range, high bandwidth and read-out noise levels below 8 ${\mu}$g/$\sqrt{\mathrm{Hz}}$. The straightforward assembly and low cost of our device make it a prime candidate for…
An extremely sensitive temperature measurement MEMS device is developed based on the principle of structural deflection in a bi-material cantilever caused by a difference in thermal expansion coefficients. A dual-beam asymmetrical geometry…
In this study, we propose a method for single sensor-based activity recognition, trained with data from multiple sensors. There is no doubt that the performance of complex activity recognition systems increases when we use enough sensors…
We present characterization results and performance of a prototype Multiple-Amplifier Sensing (MAS) silicon charge-coupled device (CCD) sensor with 16 channels potentially suitable for faint object astronomical spectroscopy and low-signal,…
We demonstrate a microfabricated optomechanical accelerometer that is capable of percent-level accuracy without external calibration. To achieve this capability, we use a mechanical model of the device behavior that can be characterized by…
Micro-electro mechanical systems (MEMS) thermal flow sensors are increasingly used for compact, low-power flow monitoring in biomedical applications. However, silicon-based method for sensor fabrication is limited by high cost, rigidity,…
A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low…
The activated torsion oscillation magnetometer exploits the mechanical resonance of a cantilever beam, driven by the torque exerted on the sample by an ac field applied perpendicularly to the film plane. We describe a model for the…