This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is built. This "electro-physical" modulator realizes an analog-to-digital conversion of the signal. Besides the feedback scheme should improve the sensor performance.
@article{arxiv.0805.0920,
title = {Study of First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers},
author = {Pascal Nouet and Frédérick Mailly and Laurent Latorre and Pascal Nouet},
journal= {arXiv preprint arXiv:0805.0920},
year = {2008}
}
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Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)