On-chip thermometry at deep-cryogenic temperatures is vital in quantum computing applications to accurately quantify the effect of increased temperature on qubit performance. In this work, we present a sub-1 K temperature sensor in CMOS technology based on the temperature dependence of the critical current of a superconducting (SC) thin-film. The sensor is implemented in 22-nm fully depleted silicon on insulator (FDSOI) technology and comprises a 6 nA resolution current-output digital-to-analog converter (DAC), a transimpedance amplifier (TIA) with a SC thin-film as a gain element, and a voltage comparator. The circuit dissipates 1.5 uW and is demonstrated operating at ambient temperatures as low as 15 mK, providing a variable temperature resolution reaching sub-10 mK.
@article{arxiv.2409.06838,
title = {An Integrated Deep-Cryogenic Temperature Sensor in CMOS Technology for Quantum Computing Applications},
author = {Fabio Olivieri and Grayson M. Noah and Thomas Swift and M. Fernando Gonzalez-Zalba and John J. L. Morton and Alberto Gomez-Saiz},
journal= {arXiv preprint arXiv:2409.06838},
year = {2025}
}
Comments
This work has been submitted to the IEEE for possible publication