Related papers: Design, Fabrication, Characterization and Reliabil…
Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Accurate mechanical properties are important for successful…
Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…
This study investigates a high Q-factor spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process. The spiral inductor is manufactured on silicon substrate using the 0.35 micrometers CMOS…
The integration of Large Language Models (LLMs) into Electronic Design Automation (EDA) and hardware security is rapidly reshaping the semiconductor industry. While LLMs offer unprecedented capabilities in generating Register Transfer Level…
Moore Law states that transistor density will double every two years, which is sustained until today due to continuous multi-directional innovations, such as extreme ultraviolet lithography, novel patterning techniques etc., leading the…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
CMOS pixel sensors (CPS) represent a novel technological approach to building charged particle detectors. CMOS processes allow to integrate a sensing volume and readout electronics in a single silicon die allowing to build sensors with a…
We present a machine-learning guided approach to predict saturation magnetization (MS) and coercivity (HC) in Fe-rich soft magnetic alloys, particularly Fe-Si-B systems. ML models trained on experimental data reveals that increasing Si and…
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts…
We present the coupled oscillator: a new mechanism for signal amplification with widespread application in metrology. We introduce the mechanical theory of this framework, and support it by way of simulations. We present a particular…
Studying the dynamical behavior of micro- and nano-mechanical systems (MEMS and NEMS) is essential in various fields from nonlinear dynamics to quantum technologies. Hence, it is important to be able to precisely monitor the mechanical…
Advancement of molecular devices will critically depend on the approach to establish electrical connections to the functional molecule(s). We produced a molecular device strategy which is based on chemically attaching of molecules between…
We report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated…
High-field superconducting REBCO magnets contain several coils with many turns. For these magnets, electro-thermal quench is an issue that magnet designers need to take into account. Thus, there is a need for a fast and accurate software to…
Nowadays, silicon micro-cantilevers with different geometrical shapes are widely used as micro-electro-mechanical systems and, more recently, as force sensor probes in atomic force microscopy (AFM). During the last ten years, several…
A variety of scientific fields like proteomics and spintronics have created a new demand for on-chip devices capable of sensing parameters localized within a few tens of micrometers. Nano and microelectromechanical systems (NEMS/MEMS) are…
Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This paper presents a CMOS quantum…
We demonstrate a non-volatile magnetoelectric magnonic memory (MEMM) that enables fully electrical write/read via direct magnon-driven sensing in an insulating antiferromagnet. A fabricated SrIrO3/La-BiFeO3/SrIrO3 trilayer exhibits sub-100…
Microelectromechanical systems (MEMS) have been applied to many measurement problems in physics, chemistry, biology and medicine. In parallel, cavity optomechanical systems have achieved quantum-limited displacement sensitivity and ground…
Laser-induced Terahertz (THz) Emission Spectroscopy (TES) has demonstrated its potential utility in the realm of Metal-Oxide-Semiconductor (MOS) devices as an expedient and noncontact estimation methodology. Owing to its discerning response…