Related papers: Miniature Plasma Source for In-Situ Scanner Cleani…
The new EUV Lithography tools for IC High Volume Manufacture at 22nm make use of EUV radiation at \lambda = 13.5nm. High power Laser (LPP) and Discharge (DPP)EUV light sources are based on Sn plasmas for the optimum conversion of electrical…
High-harmonic generation (HHG) is used as a source for various imaging applications in the extreme ultraviolet spectral range. It offers spatially coherent radiation and unique elemental contrast with the potential for attosecond time…
There is an urgent need for disinfection and sterilization devices accessible to the public that can be fulfilled by innovative strategies for using cold atmospheric pressure plasmas. Here we explore and evaluate an approach combining a…
Negative atomic hydrogen ion (H$^{-}$) densities were measured in a pulsed low-pressure E-mode inductively-coupled radio-frequency (rf) driven plasma in hydrogen by means of laser photodetachment and a Langmuir probe. This investigation…
Plasma diagnostics have a shortage of fast and sensitive calorimetric sensors that can track substrate temperature during plasma-assisted microfabrication. In this work, energy fluxes from argon and oxygen radiofrequency (RF) glow…
A new compact electron cyclotron resonance (ECR) ion source for low current applications, designed and built in-house at the University of the Basque Country (UPV/EHU) is presented. The source was designed to use as many commercially…
High-intensity laser pulses covering the ultraviolet to terahertz spectral regions are nowadays routinely generated in a large number of laboratories. In contrast, intense extreme-ultraviolet (XUV) pulses have only been demonstrated using a…
Among various surface modification techniques, plasma can be used as a source for tailoring the surface properties of diverse materials. HDPE and fluoropolymer surfaces have been treated by the post-discharge of an atmospheric RF-plasma…
Cold atmospheric pressure plasmas are crucial for applications in medicine, agriculture, and material processing, where their interaction with ambient air generates reactive oxygen and nitrogen species for disinfection and treatment…
The study investigates the effectiveness of using low-pressure oxygen plasma, generated by microwave discharge, to sterilize bacterial spores of Bacillus Stearothermophilus and Bacillus Subtilis. Plasma, a highly ionized state of matter…
HELicon Experiment for Negative ion source (HELEN-I) with single driver is developed with a focus on the production of negative hydrogen ions. In the Helicon wave heated plasmas, very high plasma densities ($\sim10^{19} m^{-3}$) can be…
We measured for the first time the electron density in an Extreme Ultra-Violet induced plasma. This is achieved in a low-pressure argon plasma by using a method called microwave cavity resonance spectroscopy. The measured electron density…
In situ exploration of the planetary atmospheres requires the development of laboratory experiments to understand the molecular growth pathways initiated by photochemistry in the upper layers of the atmospheres. Major species and dominant…
This paper proposes a simple, four-mirror, in-line projector for high-NA EUV lithography that eliminates the most troublesome mask 3D effect. The design consists of a two-stage concave-convex pair, where optical aberrations are cancelled…
One of the major goals of research for laser-plasma accelerators is the realization of compact sources of femtosecond X-rays. In particular, using the modest electron energies obtained with existing laser systems, Compton scattering a…
We demonstrate a simple, lossless method for monitoring photon flux in short-wavelength metrology systems, with a particular focus on applications using high harmonic generation (HHG) light sources. In HHG-based metrology, where photon…
For the first time the emission of the radiative dissociation continuum of the hydrogen molecule ($a^{3}\Sigma_{g}^{+} \to b^{3}\Sigma_{u}^{+}$ electronic transition) is proposed to be used as a source of information for the spectroscopic…
A compact low-energy and high-intensity electron source for material aging applications is presented. A laser-induced plasma moves inside a 30 kV diode and produces a 5 MW electron beam at the anode location. The corresponding dose that can…
Chip-scale atomic devices built around micro-fabricated alkali vapor cells are at the forefront of compact metrology and atomic sensors. We demonstrate a micro-fabricated vapor cell that is actively-pumped to ultra-high-vacuum (UHV) to…
In this paper we describe a simple and inexpensive method to generate plasma using a kitchen microwave. The microwave-generated plasma is characterized by spectroscopic analysis and compared with the absorption spectra of a gas discharge…