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We present a systematic study of the properties of TiN films by varying the deposition conditions in an ultra-high-vacuum reactive magnetron sputtering chamber. By increasing the deposition pressure from 2 to 9 mTorr while keeping a nearly…

Autonomous experimentation has emerged as an efficient approach to accelerate the pace of materials discovery. Although instruments for autonomous synthesis have become popular in molecular and polymer science, solution processing of hybrid…

The ion-bombardment induced evolution of intermixing is studied by molecular dynamics simulations and by Auger electron spectroscopy depth profiling analysis (AESD) in Cu/Co multilayer. It has been shown that from AESD we can derive the…

Materials Science · Physics 2007-05-23 M. Menyhárd , P. Süle

Grazing incidence x-ray scattering provides nanostructural information for thin film samples, but single images generally do not provide information on film thickness or the full complex index of refraction. Additionally, for thin films…

Applied Physics · Physics 2020-11-10 Peter J. Dudenas , Adam Z. Weber , Ahmet Kusoglu

By adjusting the incidence angle of incoming X-ray near the critical angle of X-ray total reflection, the photoelectron intensity is strongly modulated due to the variation of X-ray penetration depth. Photoelectron spectroscopy (PES)…

Materials Science · Physics 2021-11-23 Julien E. Rault , Cheng-Tai Kuo , Henrique P. Martins , Giuseppina Conti , Slavomir Nemšák

Small angle X-ray scattering (SAXS) was used to quantitatively study the morphology of aligned, mono-disperse conical etched ion tracks in thin films of amorphous silicon dioxide with aspect ratios of around 6:1, and in polycarbonate foils…

Molecular dynamics simulations are often used to study sputtering and thin film growth. Compressive stresses in these thin films are generally assumed to be caused by a combination of forward sputtered (peened) built-in particles and…

Materials Science · Physics 2022-08-24 Tobias Gergs , Thomas Mussenbrock , Jan Trieschmann

The use of Thin-foil proton recoil (TPR) spectrometers to measure neutrons from Deuterium-Tritium (DT) fusion plasma has been studied previously and is a well established technique for neutron spectrometry. The study presented here focuses…

This study entailed the successful deployment of a novel neutron interferometer that utilizes multilayer mirrors. The apparatus facilitates a precise evaluation of the wavelength dependence of interference fringes utilizing a pulsed neutron…

Factor Analysis has proved to be a powerful tool for the full exploitation of the chemical information included in the peak shapes and peak positions of spectra measured by AES depth profiling. Due to its ability to extract the number of…

Materials Science · Physics 2015-02-13 Uwe Scheithauer

This study aims towards a systematic reciprocity of the tunable synthesis parameters - partial pressure of N$_2$ gas, ion energy (\Ei) and Ti interface in TiN thin film samples deposited using ion beam sputtering at ambient temperature…

Materials Science · Physics 2020-06-22 Susmita Chowdhury , Rachana Gupta , Shashi Prakash , Layanta Behera , D. M. Phase , Mukul Gupta

The applicability of standard methods for compositional analysis is limited for H-containing films. Neutron reflectometry is a powerful, non-destructive method that is especially suitable for these systems due to the large negative…

The determination of depth profiles across interfaces is of primary importance in many scientific and technological areas. Photoemission spectroscopy is in principle well suited for this purpose, yet a quantitative implementation for…

We have investigated the properties of interfaces between LaAlO3 films grown on SrTiO3 substrates singly terminated by TiO2. We used RF sputtering in a high-pressure oxygen atmosphere. The films are smooth, with flat surfaces. Transmission…

Materials Science · Physics 2011-11-23 I. M. Dildar , D. B. Boltje , M. H. S. Hesselberth , Q. Xu , H. W. Zandbergen , S. Harkema

The physical principles of the MRI model (abbreviation for mixing-roughness- information depth) for the theoretical calculation of measured concentration- depth profiles obtained in sputter depth profiling with AES, XPS, SIMS, etc. are…

Materials Science · Physics 2007-05-23 Siegfried Hofmann

To enhance the reflectivity of X-ray mirrors beyond the critical angle, multilayer coatings are required. Interface imperfections in the multilayer growth process are known to cause non-specular scattering and degrade the mirror optical…

Optics · Physics 2013-04-05 B. Salmaso , D. Spiga , R. Canestrari , L. Raimondi

By combining x-ray excited Auger electron diffraction experiments and multiple scattering calculations we reveal a layer-resolved shift for the Mg KL23L23 Auger transition in MgO ultrathin films (4-6 \AA) on Ag(001). This resolution is…

Materials Science · Physics 2015-06-16 T. Jaouen , S. Tricot , G. Delhaye , B. Lépine , D. Sébilleau , G. Jézéquel , P. Schieffer

We report on a new x-ray imaging method, which combines the high spatial resolution of coherent diffraction imaging with the ability of dark field microscopy to map grains within thick polycrystalline specimens. An x-ray objective serves to…

Instrumentation and Detectors · Physics 2020-07-15 Anders Filsøe Pedersen , Virginie Chamard , Carsten Detlefs , Tao Zhou , Dina Carbone , Henning Friis Poulsen

Depth profiling of graphene with high-resolution ion beam analysis is a practical method for analysis of monolayer thicknesses of graphene. Not only is the energy resolution sufficient to resolve graphene from underlying SiC, but by use of…

Materials Science · Physics 2011-08-11 M. Copel , S. Oida , A. Kasry , A. A. Bol , J. B. Hannon , R. M. Tromp

A method of using X-ray absorption spectroscopy (XAS) together with resolved grazing incidence geometry for depth profiling atomic, electronic, chemical or magnetic local structures in thin films is presented. The quantitative deconvolution…