Related papers: Parametrically Amplified Low-Power MEMS Capacitive…
The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity (RH) sensor that can be incorporated into a…
We report on measurements performed at low temperatures on a nanoelectromechanical system (NEMS) under (capacitive) parametric pumping. The excitations and detection schemes are purely electrical, and enable in the present experiment the…
Increasing the energy density in electric double layer capacitors (EDLCs), also known as supercapacitors, remains an active area of research. Specifically, there is a need to design and discover electrode and electrolyte materials with…
Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromechanical device. This enables very fast and sensitive…
Parametric amplifiers have allowed breakthroughs in ultrafast, strong-field, and high-energy density laser science and are an essential tool for extending the frequency range of powerful emerging diode-pumped solid-state laser technology.…
Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink…
We present the design, fabrication and response of humidity sensor based on electrical tunneling through temperature-stabilized nanometer gaps. The sensor consists of two stacked metal electrodes separated by 2.5 nm of vertical air gap.…
We present the design, fabrication, and response of a low-power, polymer-based VOC sensor based on the self-leveling of mechanically leveraged structures. The device utilizes folded polymer-coated microcantilevers to achieve passive…
We present a single-quadrature feedback scheme able to overcome the conventional 3 dB limit on parametric squeezing. The method is experimentally demonstrated in a micromechanical system based on a cantilever with a magnetic tip. The…
We propose the realization of capacitive temperature sensors based on the concept of displacement amplification. Our design features two high coefficient of thermal expansion (CTE) metallic layers separated by a low-CTE dielectric layer;…
The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first solution was designed to interface a capacitive humidity sensor…
Wireless electromagnetic sensing is a passive, non-destructive technique for measuring physical and chemical changes through permittivity or conductivity changes. However, the readout is limited by the sensitivity of the materials, often…
At the Department of Electron Devices a cheap, more or less CMOS process compatible capacitive type RH sensor has been developed. Capacitive sensors are based on dielectric property changes of thin films upon water vapour uptake which…
A novel instrument has been developed to monitor and record the ambient pa- rameters such as temperature, atmospheric pressure and relative humidity. These parameters are very essential for understanding the characteristics such as gain of…
In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages of capacitive pressure sensor over piezoresistive pressure…
In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of objects based on MEMS technology. This sensor is a structure of a 4x4 array, with metal Ag as the capacitive electrode, which forms the tactile…
This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has been done for frequency and displacement sensitivity. The performance of the…
Real-time and accurate monitoring of humidity and pH is of great significance in daily life and industrial production. Existing humidity and pH measurement suffer from limitations such as low sensitivity, signal crosstalk, complex system…
The low quality factor (Q) of Single-walled carbon nanotube (SWNT) resonators has limited their sensitivity in sensing application. To this end, we employ the technique of parametric amplification by modulating the spring constant of SWNT…
An extremely sensitive temperature measurement MEMS device is developed based on the principle of structural deflection in a bi-material cantilever caused by a difference in thermal expansion coefficients. A dual-beam asymmetrical geometry…