Related papers: Tunable MEMS VCSEL on Silicon substrate
A maskless post-processing technique for CMOS chips is developed that enables the fabrication of RF MEMS parallel-plate capacitors with a high quality factor and a very compact size. Simulations and measured results are presented for…
Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes…
The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan…
Optical metasurfaces have shown to be a powerful approach to planar optical elements, enabling an unprecedented control over light phase and amplitude. At that stage, where wide variety of static functionalities have been accomplished, most…
A Si/Si3N4 high contrast grating mirror has been designed for a VCSEL integration in mid-infrared ({\lambda} = 2.65 $\mu$m). The use of an optimization algorithm which maximizes a VCSEL mirror quality factor allowed the adjustment of the…
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for high frequency signal processing circuits like reference oscillators and filters. This is due to their exceptional features like small size, large…
The field of microelectromechanical Systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities…
High polarization selective Si/SiO2 mid-infrared sub-wavelength grating mirrors with large bandwidth adapted to VCSEL integration are compared. These mirrors have been automatically designed for operation at \lambda = 2.3 $\mu$m by an…
Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters) focal length…
This work presents a novel approach to create and dynamically control quasi-Bound States in the Continuum (BIC) resonances through the hybridization of 1D and 2D metasurfaces using micro-electromechanical systems (MEMS). By introducing…
Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precision is desired. However, due to the sequential nature of point-scanning techniques, the settling time of…
Efficient, low-loss, and versatile optical modulators are a critical ingredient for practical integrated photonic systems. Modulators based on micro-electromechanical systems (MEMS) have unique advantages over more traditional thermal,…
Silicon photonic devices fundamental to high-density wavelength-division multiplexed (DWDM) optical links and photonic switching networks, such as resonant modulators and Mach-Zehnder interferometers (MZIs), are highly sensitive to…
A multi-level tunable reflection array wide-angle beam scanning method is proposed to address the limited bandwidth and small scanning angle issues of current terahertz beam scanning technology. In this method, a focusing lens and its array…
We report on the design, fabrication and characterization of silica microtoroid based cavity opto-electromechanical systems (COEMS). Electrodes patterned onto the microtoroid resonators allow for rapid capacitive tuning of the optical…
We describe here the implementation of an interferometer-based microwave impedance microscope on a home-built tuning-fork based scanning probe microscope (SPM). Tuning-fork based SPMs, requiring only two electrical contacts for…
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts…
Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…
Optically resonant particles are key building blocks of many nanophotonic devices such as optical antennas and metasurfaces. Because the functionalities of such devices are largely determined by the optical properties of individual…
Previously reported acoustic metasurfaces that consist of fixed channels, are untunable to meet the broadband requirement and alterable functionalities. To overcome this limitation, we propose screw-and-nut mechanism of tunability and…