Robust design of Si/Si3N4 high contrast grating mirror for mid-infrared VCSEL application
Optics
2012-05-04 v1
Abstract
A Si/Si3N4 high contrast grating mirror has been designed for a VCSEL integration in mid-infrared ({\lambda} = 2.65 m). The use of an optimization algorithm which maximizes a VCSEL mirror quality factor allowed the adjustment of the grating parameters while keeping large and shallow grating pattern. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances. The final mirror exhibits large high reflectivity bandwidth with a polarization selectivity and several percent of tolerance on the grating dimensions.
Keywords
Cite
@article{arxiv.1205.0630,
title = {Robust design of Si/Si3N4 high contrast grating mirror for mid-infrared VCSEL application},
author = {Christyves Chevallier and Nicolas Fressengeas and Frédéric Genty and Joel Jacquet},
journal= {arXiv preprint arXiv:1205.0630},
year = {2012}
}
Comments
The final publication is available at http://www.springerlink.com, Optical and Quantum Electronics (2012) Online First