Related papers: Tunable MEMS VCSEL on Silicon substrate
As an essential module of optical systems, varifocal lens usually consists of multiple mechanically moving lenses along the optical axis. The recent development of metasurfaces with tunable functionalities holds the promise of miniaturizing…
Miniaturized spectrometers are widely used for non-destructive and on-field spectral analysis. Here we report a tunable grating-based MEMS spectrometer for visible to near-infrared (VIS-NIR) spectroscopy. The MEMS spectrometer consists of a…
Membrane external-cavity surface-emitting lasers (MECSELs) are at the forefront of pushing the performance limits of vertically emitting semiconductor lasers. Their simple idea of using just a very thin (hundreds of nanometers to few…
This work introduces the design analysis simulation and a standard MEMS fabrication process for a three dimensional microcoil with a magnetic core and a digital switch configuration using a completely integrated fully MEMS compatible…
Depending on the type of Micro-Electro-Mechanical System (MEMS), packaging costs are contributing up to 80% of the total device cost. Each MEMS device category, its function and operational environment will individually dictate the…
Vertical cavity surface emitting lasers (VCSELs) have made indispensable contributions to the development of modern optoelectronic technologies. However, arbitrary beam shaping of VCSELs within a compact system still remains inaccessible…
A high reflectivity and polarization selective high contrast grating mirror has been designed with the use of an automated optimization algorithm. Through a precise study of the tolerance of the different lengths of the structure, the…
We propose a compact MEMS-based optical autocorrelator based on a micromachined Michelson interferometer in silicon and the two-photon absorption non-linearity in a photodetector. The miniaturized autocorrelator has a scanning range of 1.2…
The development of color centers in silicon enables scalable quantum technologies by combining telecom-wavelength emission and compatibility with mature silicon fabrication. However, large-scale integration requires precise control of each…
We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulator-metal (MIM) capacitors and…
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…
Silicon photonics has thrived in telecommunications over recent decades, and its extension to the mid-infrared range has the potential to unlock valuable opportunities for sensing, imaging, and free-space communications. With this…
Tunable metasurfaces enable active and on-demand control over optical wavefronts through reconfigurable scattering of resonant nanostructures. Here, we present novel insights inspired by mechanical metamaterials to achieve giant tunability…
We have tuned the whispering gallery modes of a fused silica micro- resonator over nearly 1 nm at 800 nm, i.e.over half of a free spectral range or the equivalent of 10^6 linewidths of the resonator.This has been achieved by a new method…
The conventional lens's tunability drawback always restricts their application compared to the metasurface lens (metalens). On the other side, reconfigurable metalenses offer the benefits of ultrathin thickness and capable of tunability.…
We develop a novel hyperspectral imaging system using structured illumination in an SLM-based Michelson interferometer. In our design, we use a reflective SLM as a mirror in one of the arms of a Michelson interferometer, and scan the…
Metasurfaces have emerged as a powerful platform to control free-space light at the subwavelength scale, enabling applications in sensing, lasing, nonlinear optics, and quantum photonics. However, their practical deployment is hindered by…
Mid-infrared (MIR) emitters are critical components in advanced photonic systems, driving progress in fields such as chemical sensing, environmental monitoring, medical diagnostics, thermal imaging and free-space communications.…
: It goes without saying that at present MEMS Technology became one of the latest and emerging methods because of its miniaturization and effective cost. Now near the beginning recognition of disease became a major challenge in front of…
We present a beam steering system based on micro-electromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic…