Dispersion Control in Micromechanical Evanescent Optical Modulators

Efficient, low-loss, and versatile optical modulators are a critical ingredient for practical integrated photonic systems. Modulators based on micro-electromechanical systems (MEMS) have unique advantages over more traditional thermal, electro-optic, or plasma dispersion modulators. In this work, we show that evanescent MEMS modulators (in which a dielectric slab is mechanically inserted into a waveguide's evanescent field) can exhibit anomalously dispersive modulation. That is, despite positive modulation of a waveguide mode's effective index, the modulator brings about a negative change in group index. We experimentally demonstrate these unique capabilities using a novel MEMS actuator design. The new theory and results here reveal that evanescent MEMS modulators possess a capability for control of wavelength dispersion not accessible to nearly any other type of modulator. These new capabilities may enable on-chip integration of systems for various optical applications, including broadband switching, photonic true time delay, pulse shaping, or phase matching of nonlinear processes.