English
Related papers

Related papers: Exploiting atomic layer deposition for fabricating…

200 papers

The future success of integrated circuits (IC) technology relies on the continuing miniaturization of the feature size, allowing more components per chip and higher speed. Extreme anisotropy opens new opportunities for spatial pattern…

Optics · Physics 2016-08-10 Jingbo Sun , Tianboyu Xu , Natalia M. Litchinitser

Controlled and precise fabrication of structures with heights in the range of single digit nanometres is one of the challenges for diffraction gratings operating near-normal incidence in the extreme ultraviolet (EUV) and soft X-ray range.…

Applied Physics · Physics 2026-01-09 Johannes Kaufmann , Thomas Siefke , Uwe Zeitner

Non-destructive nano-imaging of the internal structure of solid matter is only feasible using hard X-rays due to their high penetration. The highest resolution images are achieved at synchrotron radiation sources (SRF), offering superior…

Four-dimensional scanning transmission electron microscopy (4D-STEM) of local atomic diffraction patterns is emerging as a powerful technique for probing intricate details of atomic structure and atomic electric fields. However, efficient…

Image and Video Processing · Electrical Eng. & Systems 2019-01-15 Xin Li , Ondrej E. Dyck , Mark P. Oxley , Andrew R. Lupini , Leland McInnes , John Healy , Stephen Jesse , Sergei V. Kalinin

We report a new approach for progressive and well-controlled downsizing of nanostructures below the 10 nm scale. Low energetic ion beam (Ar+) is used for gentle surface erosion, progressively shrinking the dimensions with ~ 1 nm accuracy.…

Mesoscale and Nanoscale Physics · Physics 2015-05-13 M. Zgirski , K. P. Riikonen , V. Tuboltsev , P. Jalkanen , T. T. Hongisto , K. Yu Arutyunov

Superpositions of paraxial laser beam modes to generate atom-optical lenses based on the optical dipole force are investigated theoretically. Thin, wide, parabolic, cylindrical and circular atom lenses with numerical apertures much greater…

Quantum Physics · Physics 2013-06-26 Ole Steuernagel

Micro/nano electro-mechanical systems (MEMS/NEMS) are constantly attracting an increasing attention for their relevant technological applications in fields ranging from biology, medicine, ecology, energy to industry. Most of the…

Materials Science · Physics 2021-03-10 Omar Tricinci , Marco Carlotti , Andrea Desii , Fabian Meder , Virgilio Mattoli

Sub-100 nm polymeric spherical plano-convex nano-lens arrays are fabricated using short electron beam exposures to selectively modify the ultrathin (< 30 nm) polymer films, followed by their intensified self-organized dewetting under an…

Soft Condensed Matter · Physics 2011-09-20 Ankur Verma , Ashutosh Sharma

Silicon nanostructuring imparts unique material properties including antireflectivity, antifogging, anti-icing, self-cleaning, and/or antimicrobial activity. To tune these properties however, a good control over features size and shape is…

Deterministic and versatile approaches to sample preparation on nanoscopic scales are important in many fields including photonics, electronics, biology and material science. However, challenges exist in meeting many nanostructuring…

Characterization and control of the transverse phase space of high-brightness electron beams is required at free-electron lasers or electron diffraction experiments for emittance measurement and beam optimization as well as at advanced…

Colloidal lithography [1] is how patterns are reproduced in a variety of natural systems and is used more and more as an efficient fabrication tool in bio-, opto-, and nano-technology. Nanoparticles in the colloid are made to form a mask on…

Mesoscale and Nanoscale Physics · Physics 2013-11-27 A. Iovan , M. Fischer , R. Lo Conte , V. Korenivski

Transmission electron beams (TEBs) have long been used to study and manipulate materials at nanometer scales. In the late 1970's, Cherns demonstrated surface pitting in Au films upon exposure to a 1MeV TEB and observed crystal dislocations…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 M. D. Fischbein , M. Drndic

Transmission electron microscopes use electrons with wavelengths of a few picometers, potentially capable of imaging individual atoms in solids at a resolution ultimately set by the intrinsic size of an atom. Unfortunately, due to…

The fabrication of multilayered heterostructures is essential for advancing microelectronic and biosensing technologies. Conventional top-down manufacturing techniques are often cost-prohibitive and unsuitable for biomedical applications.…

Chemical Physics · Physics 2025-06-13 Anand Dev Ranjan , Suyash Narayan Amzare , Subhrokoli Ghosh , Ayan Banerjee

The development of synchrotron radiation light sources has been going on for decades. Recently, X-ray free-electron lasers as well as the fourth-generation synchrotron radiation sources based on multiple bend achromat lattices are…

Accelerator Physics · Physics 2023-11-29 Zengguang Tang

Astronomical imaging with micro-arcsecond ($\mu$as) angular resolution could enable breakthrough scientific discoveries. Previously-proposed $\mu$as X-ray imager designs have been interferometers with limited effective collecting area. Here…

Instrumentation and Methods for Astrophysics · Physics 2020-06-24 Brandon D. Chalifoux , Ralf K. Heilmann , Herman L. Marshall , Mark L. Schattenburg

Origami design principles are scale invariant and enable direct miniaturization of origami structures provided the sheets used for folding have equal thickness to length ratios. Recently, seminal steps have been taken to fabricate…

We demonstrate the ability to create electron beams with high-contrast, nanometer-scale density modulations as a first step toward developing full control of the phase fronts of an x-ray free-electron laser. The nanopatterned electron beams…