Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer
Abstract
X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while changing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot in a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with high signal-to-noise. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enable nanoscale, element-specific X-ray imaging in a compact footprint. The proof-of-concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in 6 layers of a Cu-SiO2 integrated circuit, and a path towards finer resolution and enhanced imaging capabilities is discussed.
Cite
@article{arxiv.2212.10591,
title = {Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer},
author = {Nathan Nakamura and Paul Szypryt and Amber L. Dagel and Bradley K. Alpert and Douglas A. Bennett and W. Bertrand Doriese and Malcolm Durkin and Joseph W. Fowler and Dylan T. Fox and Johnathon D. Gard and Ryan N. Goodner and J. Zachariah Harris and Gene C. Hilton and Edward S. Jimenez and Burke L. Kernen and Kurt W. Larson and Zachary H. Levine and Daniel McArthur and Kelsey M. Morgan and Galen C. O'Neil and Nathan J. Ortiz and Christine G. Pappas and Carl D. Reintsema and Daniel R. Schmidt and Peter A. Schultz and Kyle R. Thompson and Joel N. Ullom and Leila Vale and Courtenay T. Vaughan and Christopher Walker and Joel C. Weber and Jason W. Wheeler and Daniel S. Swetz},
journal= {arXiv preprint arXiv:2212.10591},
year = {2024}
}