We report a new approach for progressive and well-controlled downsizing of nanostructures below the 10 nm scale. Low energetic ion beam (Ar+) is used for gentle surface erosion, progressively shrinking the dimensions with ~ 1 nm accuracy. The method enables shaping of nanostructure geometry and polishing the surface. The process is clean room / high vacuum compatible being suitable for various applications. Apart from technological advantages, the method enables study of various size phenomena on the same sample between sessions of ion beam treatment.
@article{arxiv.0801.2515,
title = {Ion beam shaping and downsizing of nanostructures},
author = {M. Zgirski and K. P. Riikonen and V. Tuboltsev and P. Jalkanen and T. T. Hongisto and K. Yu Arutyunov},
journal= {arXiv preprint arXiv:0801.2515},
year = {2015}
}