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Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures (plates or array of thin beams) with cross-sections of the order of microns and lengths of the order of tens or hundreds of microns. Electrostatic forces play…

Computational Physics · Physics 2007-05-23 N. Majumdar , S. Mukhopadhyay

Non-linearities play an important role in micro- and nano- electromechanical system (MEMS and NEMS) design. In common electrostatic and magnetic actuators, the forces and voltages can depend in a non-linear way on position, charge, current…

Mesoscale and Nanoscale Physics · Physics 2013-08-14 Peter G. Steeneken , Jiri Stulemeijer

This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable…

Other Computer Science · Computer Science 2008-12-18 C. Seguineau , M. Ignat , C. Malhaire , S. Brida , X. Lafontan , J. -M. Desmarres , C. Josserond , L. Debove

We have designed and characterized micro-electro-mechanical systems (MEMS) for applications at low temperatures. The mechanical resonators were fabricated using a surface micromachining process. The devices consist of a pair of parallel…

Mesoscale and Nanoscale Physics · Physics 2013-01-24 M. Gonzalez , P. Zheng , E. Garcell , Y. Lee , H. B. Chan

Particle-wall interactions play a crucially important role in various applications such as microfluidic devices for cell sorting, particle separation, entire class of hydrodynamic filtration and its derivatives, etc. Yet, accurate…

Fluid Dynamics · Physics 2025-03-18 Aryan Mehboudi , Shrawan Singhal , S. V. Sreenivasan

Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 M. L. Roukes

Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product,…

Other Computer Science · Computer Science 2012-02-15 Ritesh Ray Chaudhuri , Joydeep Basu , Tarun Kanti Bhattacharyya

Silicon tracking detectors provide excellent spatial resolution, and so can provide excellent momentum resolution for energetic charged particles, even in compact detectors. However, at lower momenta, multiple scattering in the silicon…

Instrumentation and Detectors · Physics 2020-04-22 Spencer R. Klein

Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Accurate knowledge on the mechanical behaviors of thin film…

Other Computer Science · Computer Science 2008-02-22 Ming-Tzer Lin , K. -S. Shiu , Chi-Jia Tong

Scanning transmission electron microscopy (STEM) has advanced rapidly in the last decade thanks to the ability to correct the major aberrations of the probe forming lens. Now atomic-sized beams are routine, even at accelerating voltages as…

CMOS Pixel Sensors tend to become relevant for a growing spectrum of charged particle detection instruments. This comes mainly from their high granularity and low material budget. However, several potential applications require a higher…

The various algorithms used to extrapolate particle trajectories from measurements are often very time-consuming with computational complexities which are typically quadratic. In this article, we propose a new algorithm called GEM with a…

Data Analysis, Statistics and Probability · Physics 2018-06-22 Frédéric Magniette

Despite significant advances in particle imaging technologies over the past two decades, few advances have been made in particle tracking, i.e. linking individual particle positions across time series data. The state-of-the-art tracking…

Soft Condensed Matter · Physics 2022-01-25 Ella M. King , Zizhao Wang , David A. Weitz , Frans Spaepen , Michael P. Brenner

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…

Other Computer Science · Computer Science 2007-11-29 V. Rochus , J. -C. Golinval , C. Louis , C. Mendez , I. Klapka

This paper is a computational bifurcation analysis of a non-linear partial differential equation (PDE) characterizing equilibrium configurations in Micro electromechanical Systems (MEMS). MEMS are engineering systems that utilize…

Dynamical Systems · Mathematics 2024-01-24 Charles Naudet , Alan E. Lindsay

We study approximations of evolving probability measures by an interacting particle system. The particle system dynamics is a combination of independent Markov chain moves and importance sampling/resampling steps. Under global regularity…

Probability · Mathematics 2011-12-12 Andreas Eberle , Carlo Marinelli

Efficient and accurate particle tracking is crucial for measuring Standard Model parameters and searching for new physics. This task consists of two major computational steps: track finding, the identification of a subset of all hits that…

High Energy Physics - Experiment · Physics 2025-09-16 Ryan Miller , Alexander Shmakov , Kyuho Oh , Jiwon Lee , Pierre Baldi , Levi Condren , Makayla Vessella , Daniel Whiteson

Our paper presents a non-destructive thermal transient measurement method that is able to reveal differences even in the micron size range of MEMS structures. Devices of the same design can have differences in their sacrificial layers as…

Other Computer Science · Computer Science 2007-11-29 P. Szabo , B. Nemeth , M. Rencz , B. Courtois

Three Gas-Electron-Multiplier tracking detectors with an active area of 10 cm x 10 cm and a two-dimensional, laser-etched orthogonal strip readout have been tested extensively in particle beams at the Meson Test Beam Facility at Fermilab.…

Microelectromechanical (MEMS) and nanoelectromechanical systems (NEMS) are ideal candidates for exploring quantum fluids since they can be manufactured reproducibly, cover the frequency range from hundreds of kilohertz up to gigahertz and…