Related papers: Microscope Projection Photolithography Based on Ul…
Conventional microscope objective lenses are diffraction limited, which means that they cannot resolve features smaller than half the illumination wavelength. Under white light illumination, such resolution limit is about 250-300 nm for an…
Mask-based pattern generation is a crucial step in microchip production. The next-generation extreme-ultraviolet- (EUV) lithography instruments with a wavelength of \SI{13.5}{\nano\meter} is currently under development. In principle, this…
As a future charge management light source, UV light-emitting diodes (UV LEDs) offer far superior performance in a range of metrics compared to the mercury lamps used in the past. As part of a qualification program a number of short…
Delivering light to an object is one of the key steps in any imaging exercise. Tools such as LEDs and lasers are available to achieve this. These components are integrated into systems such as microscopy, medical imaging, remote sensing,…
A critical technology for high-volume manufacturing of nanoscale integrated circuits is a high-power extreme ultraviolet (EUV) light source. Over the past decades, laser-produced plasma (LPP) sources have been actively utilized in this…
This paper reports on an approach for fabrication of micro-channels with nanometer thickness achieved by optimization of UV lithography processes. Rectangular micro-channels with a staple edge are fabricated over the surface of a silicon…
Low voltage scanning electron microscopy is a powerful tool for examining surface features and imaging beam sensitive materials. Improving resolution during low voltage imaging is then an important area of development. Decreasing the effect…
Microfluidic devices are increasingly used in synchrotron-based experiments to deliver and probe liquid samples, offering advantages such as minimal sample consumption and reduced radiation damage. Despite their growing use, few devices…
Ultrafast transmission electron microscopy (UTEM) has emerged as a versatile technique for the time-resolved imaging of nanoscale dynamics on timescales down to few-hundred attoseconds but the temporal and spatial resolutions are still…
Spatial light modulators enable arbitrary control of the intensity of optical light fields and facilitate a variety of applications in biology, astronomy and atomic, molecular and optical physics. For coherent light fields, holography,…
A simple and effective method to fabricate a high fill-factor triangular microlens array using the proximity printing in lithography process is reported. The technology utilizes the UV proximity printing by controlling a printing gap…
Extreme ultraviolet (EUV) lithography is the leading lithography technique in CMOS mass production, moving towards the sub-10 nm half-pitch (HP) regime with the ongoing development of the next generation high-numerical aperture (high-NA)…
The future success of integrated circuits (IC) technology relies on the continuing miniaturization of the feature size, allowing more components per chip and higher speed. Extreme anisotropy opens new opportunities for spatial pattern…
The growing demand for real-time ultraviolet (UV) monitoring calls for a simple, rapid, and low-cost strategy to prepare UV photodetectors. We prepare a wearable real-time UV photodetector based on hydrogenated titanium dioxide film…
Moving towards significantly smaller nanostructures, direct structuring techniques such as electron beam lithography approach fundamental limitations in feature size and aspect ratios. Application of nanostructures like diffractive X-ray…
Integrated coherent sources of ultra-violet (UV) light are essential for a wide range of applications, from ion-based quantum computing and optical clocks to gas sensing and microscopy. Conventional approaches that rely on UV gain materials…
Deep ultraviolet (DUV) light sources are used to neutralise isolated test masses in highly sensitive space-based gravitational experiments. An example is the LISA Pathfinder charge management system, which uses low-pressure mercury lamps. A…
Light projection displays play an increasingly important role in our modern life. Core projection systems including liquid crystal displays and digital micromirror devices can impose spatial light modulation and actively shape light waves.…
Nanoscale control of optical dispersion is essential for applications ranging from miniaturized spectrometers to color printing, all of which demand broadband spectral tunability. However, the Kramers-Kronig relations impose a fundamental…
High-resolution lithographic techniques are often limited by low volumetric throughput, since there is no universal and scalable manufacturing process that can produce 3D metasurfaces. In this work, we demonstrate a high-speed holographic…