Related papers: Silicon Vibrating Wires at Low Temperatures
This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe…
The actions of cut applied to the elastic system generate relative tool/part displacements, which induce a temperature increasing in the components of the machine tools, its environment, the system-tools-part and generate vibrations. The…
Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the…
Silicon carbide (SiC) exhibits excellent material properties attractive for broad applications. We demonstrate the first SiC optomechanical microresonators that integrate high mechanical frequency, high mechanical quality, and high optical…
In this work we study electromagnetic properties of a resonator recently suggested for the search of axions - a hypothetical candidate to explain dark matter. A wire medium loaded resonator (called a plasma haloscope when used to search for…
Mechanical resonators based on a single carbon nanotube are exceptional sensors of mass and force. The force sensitivity in these ultra-light resonators is often limited by the noise in the detection of the vibrations. Here, we report on an…
The measurement of micron-sized mechanical resonators by electrical techniques is difficult, because of the combination of a high frequency and a small mechanical displacement which together suppress the electromechanical coupling. The only…
We describe a method with which to fabricate sub-micron mechanical structures from silicon-on-insulator substrates. We believe this is the first reported method for such fabrication, and our technique allows for complex, multilayer electron…
Contactless excitation and detection of high harmonic acoustic overtones in a thin insulator single crystal are described using radio frequency spectroscopy techniques. Single crystal [001] silicon wafer samples were investigated, one side…
Silicon vacancy in silicon carbide has drawn much attention for various quantum sensing. However, most of the previous experiments are achieved using confocal scanning systems, which limit its applications in practical applications. In this…
Silicon carbide is a wide-bandgap semiconductor with an emerging CMOS technology platform and it is widely deployed in high power and harsh environment electronics. This material is also attracting interest for quantum technologies through…
Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…
When heated, micro-resonators present a shift of their resonance frequencies. We study specifically silicon cantilevers heated locally by laser absorption, and evaluate theoretically and experimentally their temperature profile and its…
The actions of cut applied to the elastic system cause relative displacements tool/part, which induce a rise in the temperature in the components of the machine tools, its environment, the system-tools-part and generate vibrations. The…
Silicon Carbide is renowned for its exceptional thermal stability, making it a crucial material for high-temperature power devices in extreme environments. While optically detected magnetic resonance in SiC has been widely studied for…
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is compatible with most of MEMS resonators and Resonant…
High quality micro- and nano-mechanical resonators are widely used in sensing, communications and timing, and have future applications in quantum technologies and fundamental studies of quantum physics. Crystalline thin-films are…
Silicon microelectronics, consisting of complementary metal oxide semiconductor (CMOS) technology, have changed nearly all aspects of human life from communication to transportation, entertainment, and healthcare. Despite the widespread and…
This paper demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror,…
In this letter, we present the direct loss tangent measurement of a high-resistivity intrinsic (100) silicon wafer in the temperature range from ~ 70 mK to 1 K, approaching the quantum regime. The measurement was performed using a technique…