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Strain engineering has been a ubiquitous paradigm to tailor the electronic band structure and harness the associated new or enhanced fundamental properties in semiconductors. In this regard, semiconductor membranes emerged as a versatile…
Silicon carbide (SiC) is a semiconductor used in quantum information processing, microelectromechanical systems, photonics, power electronics, and harsh environment sensors. However, its high temperature stability, high breakdown voltage,…
Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Accurate knowledge on the mechanical behaviors of thin film…
Granular nanostructure of electron beam resist had limited the ultimate resolution of electron beam lithography. We report a thermal process to achieve a uniform and homogeneous amorphous thin film of poly methyl methacrylate electron…
Atomic resolution imaging in transmission electron microscopy (TEM) and scanning TEM (STEM) of light elements in electron-transparent materials has long been a challenge. Biomolecular materials, for example, are rapidly altered when…
Silicon is an excellent material for microelectronics and integrated photonics with untapped potential for mid-IR optics. Despite broad recognition of the importance of the third dimension, current lithography methods do not allow…
Passive radiative cooling technologies are highly attractive in pursuing sustainable development. However, current cooling materials are often static, which makes it difficult to cope with the varying needs of all-weather thermal comfort…
This work proposes new chemical and mechanical materials and techniques for III-V semiconductor NW/silicone membrane formation and optoelectronic device fabrication. Molecular beam epitaxy (MBE)-synthesized n-, p- and i-GaP NWs were…
Robust nanoporous polymer films with approximate 100-nm thicknesses would be broadly applicable in technological areas such as flexible sensors, artificial skins, separators, antireflection and self-cleaning films. However, the creation of…
Integrated quantum photonics requires compact, efficient, and low-power phase modulators. While silicon nitride (SiN) is a promising platform, existing modulators suffer from high power consumption, thermal crosstalk, or high driving…
Recent advances in scanning transmission electron microscopy (STEM) instrumentation have made it possible to focus electron beams with sub-atomic precision and to identify the chemical structure of materials at the level of individual…
For injection of beams into circular machines with different horizontal and vertical emittance acceptance, the injection efficiency can be increased if these beams are flat, i.e. if they feature unequal transverse emittances. Generation of…
We propose a novel class of ultrathin high Q passband filters designed by properly combining different multipolar resonances sustained by an all dielectric metasurface. A rigorous analytical model, based on surface impedance homogenization…
We present a planar design of a metamaterial exhibiting electromagnetically induced transparency that is amenable to experimental verification in the microwave frequency band. The design is based on the coupling of a split-ring resonator…
Fabricating brightly fluorescent layers with nanometric thickness and digitally controlled lateral structuration remains a challenge for next-generation photonic devices, optical calibration standards, and biocompatible interfaces. Here, we…
A new generation of microfabricated MEMS for electron optics is changing electron microscopy for the better. These devices allow operations on the electron beam that are impossible with conventional electron optics. Unprecedented phase…
The terahertz spectral region, which bridges between electronics and optics, is poised to play an important role in the development of transformative wireless communication and imaging systems with unprecedented functionality. Currently, a…
The future success of integrated circuits (IC) technology relies on the continuing miniaturization of the feature size, allowing more components per chip and higher speed. Extreme anisotropy opens new opportunities for spatial pattern…
Research on silicon nitride (SiN) nanomechanical resonators produces an exceptionally rich variety of resonator geometries, for which there is currently no available rapid prototyping solution. Experimental advances in nanobeam, trampoline,…
Suspending devices on thin SiN membranes can limit their interaction with the bulk substrate and reduce parasitic capacitance to ground. While suspending devices on membranes is used in many fields including radiation detection using…