Related papers: Through-membrane electron-beam lithography for ult…
We exploit free-space interactions between electron beams and tailored light fields to imprint on-demand phase profiles on the electron wave functions. Through rigorous semiclassical theory involving a quantum description of the electrons,…
Phase-change materials (PCMs) are increasingly recognised as promising platforms for tunable photonic devices due to their ability to modulate optical properties through solid-state phase transitions. Ultrathin and low-loss PCMs are highly…
The prospect of building a quantum information processor underlies many recent advances ion trap fabrication techniques. Potentially, a quantum computer could be constructed from a large array of interconnected ion traps. We report on a…
We employ a combination of optical UV- and electron-beam-lithography to create an atom chip combining sub-micron wire structures with larger conventional wires on a single substrate. The new multi-layer fabrication enables crossed wire…
Grayscale lithography allows the creation of micrometer-scale features with spatially-controlled height in a process that is fully compatible with standard lithography. Here, solid immersion lenses are demonstrated in silicon carbide using…
We demonstrate a new design of graphene liquid cell consisting of a thin lithographically patterned hexagonal boron nitride crystal encapsulated from both sides with graphene windows. The ultra-thin window liquid cells produced have…
The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make…
The emerging applications of silicon photonics in free space, such as LiDARs and quantum photonics, urge versatile emission shaping beyond the capabilities of conventional grating couplers. A platform that offers arbitrary shaping of…
A process for growing gallium nitride (GaN) vertical p-i-n homojunctions on (111) silicon (Si) substrates using metalorganic chemical vapor deposition (MOCVD) was developed, and a triple mesa etch technique was used to fabricate efficient…
An integrated photonic platform with anchored-membrane structures, the T-Guide, is proposed and numerically investigated. These compact air-clad structures have high index contrast and are much more stable than prior membrane-type…
Electron-beam-induced conversion of materials in a transmission electron microscope uses the high power density of a localized electron beam of acceleration voltages above 100 kV as an energy source to transform matter at the sub-micron…
We report on the deterministic fabrication of sub-um mesa structures containing single quantum dots by in-situ electron-beam lithography. The fabrication method is based on a two-step lithography process using a low-temperature…
We demonstrate first- and second-order spatial differentiation of an optical beam transverse profile using thin suspended subwavelength gratings. Highly reflective one-dimensional gratings are patterned on suspended 200 nm-thick silicon…
Electron microscopes have been improved to achieve ever smaller beam spots, a key parameter that determines the instrument's resolution. The techniques to measure the size of the beam, however, have not progressed to the same degree. There…
Electrochromic devices, which dynamically change color under the applied potential, are widely studied because of its wide range of applications such as energy-efficient smart windows, rear view mirrors and display devices etc. In this…
A new type of integrated polarizer based on bent coupled optical waveguides is proposed. The simplicity of the device geometry permits its realization using only basic standard fabrication steps. A deep etched waveguide silicon nitride…
Due to their exceptional mechanical and optical properties, dielectric silicon nitride (SiN) micromembrane resonators have become the centerpiece of many optomechanical experiments. Efficient capacitive coupling of the membrane to an…
A wide range of approaches have been explored to meet the challenges of graphene nanostructure fabrication, all requiring complex and high-end nanofabrication platform and suffering from surface contaminations, potentially giving electrical…
An all-dielectric Huygens metasurface supporting electric and magnetic resonances is a promising platform for a variety of optical applications that require a combination of extremely high transmission and broad-range control of the phase…
The combination of metasurfaces with chalcogenide phase-change materials is a highly promising route towards the development of multifunctional and reconfigurable nanophotonic devices. However, their transition into real-world devices is…