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High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…

Mesoscale and Nanoscale Physics · Physics 2016-03-07 A. H. Ghadimi , D. J. Wilson , T. J. Kippenberg

Elastic dissipation through radiation towards the substrate is a major loss channel in micro- and nanomechanical resonators. Engineering the coupling of these resonators with optical cavities further complicates and constrains the design of…

Superconducting microwave circuits show great potential for practical quantum technological applications such as quantum information processing. However, fast and on-demand initialization of the quantum degrees of freedom in these devices…

High-\Qm{} mechanical resonators are crucial for applications where low noise and long coherence time are required, as mirror suspensions, quantum cavity optomechanical devices, or nanomechanical sensors. Tensile strain in the material…

In this report, we present nanoelectromechanical resonators fabricated with thin exfoliated crystals of a high-T$_c$ cuprate superconductor Bi$_2$Sr$_2$Ca$_1$Cu$_2$O$_{8+\delta}$. The mechanical readout is performed by capacitively coupling…

We investigate the low loss acoustic motion of superfluid $^4$He parametrically coupled to a very low loss, superconducting Nb, TE$_{011}$ microwave resonator, forming a gram-scale, sideband resolved, optomechanical system. We demonstrate…

Quantum Physics · Physics 2013-08-12 L. A. DeLorenzo , K. C. Schwab

From gravitational-wave detection, protein force microscopy, to exploration of quantum-classical boundaries, many anticipated discoveries in fundamental science require improving measurement sensitivity limits. Through the…

Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…

Quantum Physics · Physics 2016-01-18 Paul B. Dieterle , Mahmoud Kalaee , Johannes Fink , Oskar Painter

State of the art nanomechanical resonators present quality factors Q ~ 10^3 - 10^5, which are much lower than those that can be naively extrapolated from the behavior of micromechanical resonators. We analyze the dissipation mechanism that…

Mesoscale and Nanoscale Physics · Physics 2009-09-04 I. Wilson-Rae

Recently it was discovered that torsion modes of strained nanoribbons exhibit dissipation dilution, giving a route to enhanced torque sensing and quantum optomechanics experiments. As with all strained nanomechanical resonators, an…

Mesoscale and Nanoscale Physics · Physics 2025-06-04 Atkin D. Hyatt , Aman R. Agrawal , Christian M. Pluchar , Charles A. Condos , Dalziel J. Wilson

Nanomechanical resonators with ultra-high quality factors have become a central element in fundamental research, enabling measurements below the standard quantum limit and the preparation of long-lived quantum states. Here, I propose that…

Applied Physics · Physics 2022-09-13 Alexander Eichler

Mechanical resonators made with monolithic piezoelectric quartz crystals are promising for studying new physical phenomena. High mechanical quality factors ($Q$) exhibited by the mm-sized quartz resonators make them ideal for studying weak…

Applied Physics · Physics 2018-06-21 Alpo Valimaa , Jorge Santos , Caspar Ockeloen-Korppi , Mika Sillanpaa

Micro-mechanical resonators are widely used in modern sensing technology due to their high quality-factor (Q), enabling sensitive detection of various stimuli. However, the performance of these resonators in fluid environments is limited by…

Instrumentation and Detectors · Physics 2023-12-11 Sri Harsha Paladugu , Kaustav Roy , Anuj Ashok , Bibhas Nayak , Annapoorni Rangarajan , Rudra Pratap

Cavity-enhanced radiation-pressure coupling of optical and mechanical degrees of freedom gives rise to a range of optomechanical phenomena, in particular providing a route to the quantum regime of mesoscopic mechanical oscillators. A prime…

Quantum Physics · Physics 2008-07-18 G. Anetsberger , R. Rivière , A. Schliesser , O. Arcizet , T. J. Kippenberg

We report on experiments performed at low temperatures on aluminum covered silicon nanoelectromechanical resonators. The substantial difference observed between the mechanical dissipation in the normal and superconducting states measured…

Mesoscale and Nanoscale Physics · Physics 2015-12-09 K. J. Lulla , M. Defoort , C. Blanc , O. Bourgeois , E. Collin

Carbon nanotube mechanical resonators have attracted considerable interest because of their small mass, the high quality of their surface, and the pristine electronic states they host. However, their small dimensions result in fragile…

Mesoscale and Nanoscale Physics · Physics 2015-04-01 Joel Moser , Alexander Eichler , Johannes Güttinger , Mark I. Dykman , Adrian Bachtold

In this work we present the fabrication and characterization of superconducting nano-mechanical resonators made from nanocrystalline boron doped diamond (BDD). The oscillators can be driven and read out in their superconducting state and…

Mesoscale and Nanoscale Physics · Physics 2014-03-18 Tobias Bautze , Soumen Mandal , Oliver A. Williams , Pierre Rodiere , Tristan Meunier , Christopher Bauerle

Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the…

Mesoscale and Nanoscale Physics · Physics 2018-11-14 D. E. Presnov , S. Kafanov , A. A. Dorofeev , I. V. Bozhev , A. S. Trifonov , Yu. A. Pashkin , V. A. Krupenin

Preparing and manipulating quantum states of mechanical resonators is a highly interdisciplinary undertaking that now receives enormous interest for its far-reaching potential in fundamental and applied science. Up to now, only nanoscale…

We present measurements of the dissipation and frequency shift in nanomechanical gold resonators at temperatures down to 10 mK. The resonators were fabricated as doubly-clamped beams above a GaAs substrate and actuated magnetomotively.…

Mesoscale and Nanoscale Physics · Physics 2015-05-14 A. Venkatesan , K. J. Lulla , M. J. Patton , A. D. Armour , C. J. Mellor , J. R. Owers-Bradley