Elastic dissipation through radiation towards the substrate is a major loss channel in micro- and nanomechanical resonators. Engineering the coupling of these resonators with optical cavities further complicates and constrains the design of low-loss optomechanical devices. In this work we rely on the coherent cancellation of mechanical radiation to demonstrate material and surface absorption limited silicon near-field optomechanical resonators oscillating at tens of MHz. The effectiveness of our dissipation suppression scheme is investigated at room and cryogenic temperatures. While at room temperature we can reach a maximum quality factor of 7.61k (fQ-product of the order of 1011~Hz), at 22~K the quality factor increases to 37k, resulting in a fQ-product of 2×1012~Hz.
@article{arxiv.1701.03321,
title = {Efficient anchor loss suppression in coupled near-field optomechanical resonators},
author = {Gustavo O. Luiz and Felipe G. S. Santos and Rodrigo S. Benevides and Yovanny A. V. Espinel and Thiago P. M. Alegre and Gustavo S. Wiederhecker},
journal= {arXiv preprint arXiv:1701.03321},
year = {2018}
}