Related papers: Imaging Scatterometry
Scatterometry is a tested method for measuring periodic semiconductor structures. Since the sizes of modern semiconductor structures have reached the nanoscale regime, the challenge is to determine the shape of periodic nanostructures with…
Many optical measurement techniques, such as light scattering from wavelength-scale particles or detecting motion from a surface with an optical lever, encode information in a complex radiation pattern. Extracting all available information…
It has been seen recently that when probing a nanoscale object to determine, for example, size or position via light scattering, significant advantage in measurement precision can be gained from exploiting phase singularities in a…
Non-invasive detection of objects embedded inside an optically scattering medium is essential for numerous applications in engineering and sciences. However, in most applications light at visible or near-infrared wavebands is scattered by…
We experimentally demonstrate a non-imaging approach to displacement measurement for complex scattering materials. By spatially controlling the wave front of the light that incidents on the material we concentrate the scattered light in a…
We describe a self calibrating optical technique that allows to perform absolute measurements of scattering cross sections for the light scattered at extremely small angles. Very good performances are obtained by using a very simple optical…
We characterize nano-textured surfaces by optical diffraction techniques using an adapted commercial light microscope with two detectors, a CCD camera and a spectrometer. The acquisition and analyzing time for the topological parameters…
Light scattered by amorphous thin-film optical coatings limits the sensitivity of interferometric gravitational-wave detectors. We describe an imaging scatterometer to assess the role that crystal growth during annealing plays in this…
We motivate metrology schemes based on topological singularities as a way to build robustness against deformations of the system. In particular, we relate reference settings of metrological systems to topological singularities in the…
We describe a novel experimental technique for neutron imaging with scattered neutrons. These scattered neutrons are of interest for condensed matter physics, because they permit to reveal the local distribution of incoherent and coherent…
Based on high-throughput dark-field full-field optical coherence tomography, we designed and built an OCT system that can measure a variety of samples with different scattered light intensities, such as materials with multi-layer…
The correct reconstruction of individual (crossing) nerve fibers is a prerequisite when constructing a detailed network model of the brain. The recently developed technique Scattered Light Imaging (SLI) allows the reconstruction of crossing…
While scattered light conveys most of the information we perceive, scattering may also distort that information before it reaches our detectors. The problem is acute in many applications, such as in high-resolution microscopy of biological…
We theorize the surface step characterization by reflected incoherent-light differential interference microscopy with consideration of the optical diffraction effect. With the integration of localization analysis, we develop a quantitative…
The presence of a scattering medium in the imaging path between an object and an observer is known to severely limit the visual acuity of the imaging system. We present an approach to circumvent the deleterious effects of scattering, by…
In an ultrasonic array system, increasing the aperture size to achieve a high resolution requires more transmit and receive channels, thus making it essential to have an analysis technique that can reconstruct the shape and physical…
The optical elements comprised of sub-diffractive light scatterers, or metasurfaces, hold a promise to reduce the footprint and unfold new functionalities of optical devices. A particular interest is focused on metasurfaces for manipulation…
By using scattering in near field techniques, a microscope can be easily turned into a device measuring static and dynamic light scattering, very useful for the characterization of nanoparticle dispersions. Up to now, microscopy based…
We introduce "microdeflectometry", a novel technique for measuring the microtopography of specular surfaces. The primary data is the local slope of the surface under test. Measuring the slope instead of the height implies high information…
We experimentally test a recently proposed holographic method for imaging coherent light scatterers which are distributed over a 2-dimensional grid. In our setup the scatterers consist of a back-illuminated, opaque mask with submicron-sized…