Related papers: Imaging Scatterometry
Hyperspectral microscopy is an imaging technique that provides spectroscopic information with high spatial resolution. When applied in the relevant wavelength region, such as in the infrared (IR), it can reveal a rich spectral fingerprint…
Coherent illumination reflected by a remote target may be secondarily scattered by intermediate objects or materials. Here we show that phase retrieval on remotely observed images of such scattered fields enables imaging of the illuminated…
Interferometric scattering microscopy is a powerful technique that enables various applications, such as mass photometry and particle tracking. Here we present a numerical toolbox to simulate images obtained in interferometric scattering,…
When waves propagate through a complex medium, they undergo several scattering events. This phenomenon is detrimental to imaging, as it causes full blurring of the image. Here we describe a method for detecting, localizing and…
Light scattering in disordered media has been studied extensively due to its prevalence in natural and artificial systems [1]. In the field of photonics most of the research has focused on understanding and mitigating the effects of…
Light passing through scattering media will be strongly scattered and diffused into complex speckle pattern, which contains almost all the spatial information and spectral information of the objects. Although various methods have been…
Optical loss from scattered light could limit the performance of quantum-noise filter cavities being considered for an upgrade to the Advanced LIGO gravitational-wave detectors. This paper describes imaging scatterometer measurements of the…
Optoelectronic micro- and nanostructures have a vast parameter space to explore for modification and optimisation of their functional performance. This paper reports on a data-led approach using high-throughput single nanostructure…
The influence of edge roughness in angle resolved scatterometry at periodically structured surfaces is investigated. A good description of the radiation interaction with structured surfaces is crucial for the understanding of optical…
In this work we consider the inverse problem of reconstructing the optical properties of a layered medium from an elastography measurement where optical coherence tomography is used as the imaging method. We hereby model the sample as a…
Extreme ultraviolet (EUV) scatterometry is an increasingly important metrology that can measure critical parameters of periodic nanostructured materials in a fast, accurate, and repeatable manner and with high sensitivity to nanoscale…
Optical microscopy offers a unique insight of biological structures with a sub-micrometer resolution and a minimum invasiveness. However, the inhomogeneities of the specimen itself can induce multiple scattering of light and optical…
Scattering scanning near-field optical microscopy enables optical imaging and characterization of plasmonic devices with nanometer-scale resolution well below the diffraction limit. This technique enables developers to probe and understand…
Single-mode optical nanofibres are a central component of a broad range of applications and emerging technologies. Their fabrication has been extensively studied over the past decade, but imaging of the final sub-micrometre products has…
Nanoscale manufacturing requires high-precision surface inspection to guarantee the quality of the produced nanostructures. For production environments, angle-resolved scatterometry offers a non- invasive and in-line compatible alternative…
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the…
In this paper, we build an apparatus for measuring the optical transmittance and its uniformity for a semispherical surface at normal incidence; the system is primarily comprised of a traditional double-beam photometric framework and a…
Spectral measurements in the infrared (IR) optical range provide unique fingerprints of materials which are useful for material analysis, environmental sensing, and health diagnostics. Current IR spectroscopy techniques require the use of…
Structured light illumination is an active 3-D scanning technique based on projecting/capturing a set of striped patterns and measuring the warping of the patterns as they reflect off a target object's surface. In the case of phase…
Modern imaging systems can be enhanced in efficiency, compactness, and application through introduction of multilayer nanopatterned structures for manipulation of light based on its fundamental properties. High transmission efficiency…