Related papers: Exploring the temporally resolved electron density…
The new generation of lithography tools use high energy EUV radiation which ionizes the present background gas due to photoionization. To predict and understand the long term impact on the highly delicate mirrors It is essential to…
We used numerical modeling to study the evolution of EUV-induced plasmas in argon and hydrogen. The results of simulations were compared to the electron densities measured by microwave cavity resonance spectroscopy. It was found that the…
We report the first direct demonstration of possibility to generate the extreme ultraviolet (EUV) radiation with a freely expanding jet of dense plasma with multiply-charged ions supported by high-power microwaves. The detected emission…
A new approach for an in-line beam monitor for ionizing radiation was introduced in a recent publication (Beckers, J., et al. "Mapping electron dynamics in highly transient EUV photon-induced plasmas: a novel diagnostic approach using…
An experimental setup that directly reproduces Extreme UV-lithography relevant conditions for detailed component exposure tests is described. The EUV setup includes a pulsed plasma radiation source, operating at 13.5 nm; a debris mitigation…
Hairpin probes measure electron density in plasmas where other techniques are unsuitable. Previous hairpins were constructed as a quarter-wave resonant structure typically made from a folded piece of wire. The present work conducts the…
Extreme ultraviolet (EUV) induced pulsed plasma is unique due to its transient characteristics: the plasma switches between non-thermal state (when EUV power is ON at the beginning of the pulse) and thermal state (end of the pulse at ~ 20…
In this work, we present temporally resolved measurements of electron numbers created at photoionization of various gases by femtosecond laser pulse at 800 nm wavelength. The experiments were conducted in $O_2$, $Xe$, $Ar$, $N_2$, $Kr$ and…
We have used a combination of numerical modeling and experiments to study carbon etching in the presence of a hydrogen plasma. We model the evolution of a low density EUV-induced plasma during and after the EUV pulse to obtain the energy…
In this work, Rayleigh microwave scattering was utilized to measure the electron number density produced by nanosecond high voltage breakdown in air between two electrodes in a pin-to-pin configuration (peak voltage 26 kV and pulse duration…
We report on time-resolved measurements of electron number density by continuous-wave laser absorption in a low-energy nanosecond-scale laser-produced spark in atmospheric pressure air. Laser absorption is a result of free-free and…
We investigate surface plasmons from a solid-state standpoint and highlight their ultra electron density sensitivity. When a surface plasmon is excited on a planar gold film by an evanescent wave from 625 nm incident light, only a minute…
The extreme ultraviolet plasma emission from liquid microsized argon droplets exposed to intense near-infrared laser pulses has been investigated. Emission from the warm dense matter targets is recorded in a spectral range in between 16 and…
Time resolved electron density measurements in pulsed RF discharges are shown using a hairpin resonance probe using low cost electronics, on par with normal Langmuir probe boxcar mode operation. Time resolution of less than one microsecond…
Pulses of extreme ultraviolet (XUV) light, with wavelengths between 10 and 100$\,$nm, can be used to image and excite ultra-fast phenomena such as the motion of atomic electrons. Here we show that the illumination of plasma with…
Short-pulse intense lasers have the potential to model extreme astrophysical environments in laboratories. Although there are diagnostics for energetic electrons and ions resulting from laser-plasma interactions, the diagnostics to measure…
Experimental spectroscopic studies are presented, in a 5.5--25.5nm extreme-ultraviolet (EUV) wavelength range, of the light emitted from plasma produced by the irradiation of tin microdroplets by 5-ns-pulsed, 2-$\mu$m-wavelength laser…
In simulations of a 12.5PW laser (focused intensity I = 4x10^23W/cm^2) striking a solid aluminium target 10% of the laser energy is converted to gamma-rays. A dense electron-positron plasma is generated with a maximum density of 10^26/m^3;…
In this work is examined a new modeling way of describing the continuous absorption of electromagnetic (EM) radiation in a dense partially ionized hydrogen plasmas with electron densities about $5\cdot10^{18}$ cm$^{-3}$ -…
The radiation pressure of next generation ultra-high intensity ($>10^{23}$ W/cm$^{2}$) lasers could efficiently accelerate ions to GeV energies. However, nonlinear quantum-electrodynamic effects play an important role in the interaction of…