Electron drag force in EUV induced pulsed hydrogen plasmas
Plasma Physics
2021-12-28 v1
Abstract
Extreme ultraviolet (EUV) induced pulsed plasma is unique due to its transient characteristics: the plasma switches between non-thermal state (when EUV power is ON at the beginning of the pulse) and thermal state (end of the pulse at ~ 20 us). It is shown that although electron drag force acting on nm size particles in hydrogen plasma is negligible compared to the ion drag force at the beginning of the pulse, however it can be dominant at the end of the pulse and can play important role in particle transport leading to defectivity issues for semiconductor chip production technologies.
Cite
@article{arxiv.2112.13073,
title = {Electron drag force in EUV induced pulsed hydrogen plasmas},
author = {M. Chaudhuri and A. Yakunin and M. van de Kerkhof and R. Snijdewind},
journal= {arXiv preprint arXiv:2112.13073},
year = {2021}
}