Related papers: Comb-drive MEMS Oscillators for Low Temperature Ex…
We present simulations and analytic calculations of the electromagnetic microwave fields of coplanar waveguide (CPW) resonators in the vicinity of highly conducting metallic samples. The CPW structures are designed with the aim of…
Superconducting thin-film metamaterial resonators can provide a dense microwave mode spectrum with potential applications in quantum information science. We report on the fabrication and low-temperature measurement of metamaterial…
Mechanical objects have been widely used at low temperatures for decades, for various applications; from quantum fluids sensing with vibrating wires or tuning forks, to torsional oscillators for the study of mechanical properties of…
In MEMS technology, most of the devices are fabricated on glass or silicon substrate. However, this research presents a novel manufacture method that is derived from conventional hot embossing technology to fabricate the electrostatic…
The enormous stiffness and low density of graphene make it an ideal material for nanoelectromechanical (NEMS) applications. We demonstrate fabrication and electrical readout of monolayer graphene resonators, and test their response to…
We measured the vibration of a prototype superconducting magnetic bearing (SMB) operating at liquid nitrogen temperature. This prototype system was designed as a breadboard model for LiteBIRD low-frequency telescope (LFT) polarization…
Evanescent coupling between a silica optical microbottle resonator and a GaAs electromechanical resonator is demonstrated. This coupling provides high optical sensitivity and efficient piezoelectric controllability of mechanical motion.…
Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures (plates or array of thin beams) with cross-sections of the order of microns and lengths of the order of tens or hundreds of microns. Electrostatic forces play…
Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS). They enable laser distance measurements for automotive LIDAR applications as well as projection modules for the consumer market. For MEMS…
Quantum thermodynamics addresses the dynamics of heat flow in quantum devices driven out of equilibrium. Although mesoscopic circuits at low temperatures provide a flexible platform to explore this dynamics, experimental studies are wanting…
Engineered micro- and nanomechanical resonators with ultra-low dissipation constitute the ideal systems for applications ranging from high-precision sensing such as magnetic resonance force microscopy, to quantum transduction between…
Vibrating nano- and micromechanical resonators have been the subject of research aiming at ultrasensitive mass sensors for mass spectrometry, chemical analysis and biomedical diagnosis. Unfortunately, their merits diminish dramatically in…
This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require…
Micro fuel cells ($\mu$-FC) represent promising power sources for portable applications. Today, one of the technological ways to make $\mu$-FC is to have recourse to standard microfabrication techniques used in the fabrication of micro…
Topological mechanical metamaterials translate condensed matter phenomena, like non-reciprocity and robustness to defects, into classical platforms. At small scales, topological nanoelectromechanical metamaterials (NEMM) can enable the…
We report on the design and implementation of a rotating sample magnetometer (RSM) operating in the variable temperature insert of a cryostat equipped with a high-field magnet. The limited space and the cryogenic temperatures impose the…
Temperature sensors with micro- and nanoscale spatial resolution have long been explored for their potential to investigate the details of physical systems at an unprecedented scale. In particular, the rapid miniaturization of transistor…
Cavity electromechanics relies on parametric coupling between microwave and mechanical modes to manipulate the mechanical quantum state, and provide a coherent interface between different parts of hybrid quantum systems. High coherence of…
The oscillatory dynamics of nanoelectromechanical systems (NEMS) is at the heart of many emerging applications in nanotechnology. For common NEMS, such as beams and strings, the oscillatory dynamics is formulated using a dissipationless…
The mechanical behavior of any semiconductor microstructure is inevitably coupled to light. In the case of micro mechanical resonators (MEMs), carrier generation can affect the quality factor of the resonance through electron-phonon…